Projection optical system
A technology of projection optical system and positive focal power, which is applied in the field of projection optical system, can solve the problems of increasing the difficulty of optical installation and adjustment, increasing the manufacturing cost, and the difficulty of designing the structure of the mask and silicon wafer movement positioning transmission structure, etc., to achieve the reduction of optical The overall length, large space layout, and the effect of reducing the difficulty of optical installation and adjustment
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[0017] The present invention provides a kind of bi-telecentric projection optical system (object-side and image-side telecentric errors are all less than 1mrad), which uses a negative thick meniscus lens to correct field curvature and astigmatism (field curvature and astigmatism are both within ± 2nm), while obtaining better distortion and imaging quality, and providing a larger object space and image space working distance: object space 68mm, image space 16mm.
[0018] like figure 1 As shown, the projection optical system of the present invention includes 22 lenses and is divided into six lens groups G1 to G6 and arranged in sequence between the object plane and the image plane. The first lens group G1 , the third lens group G3 , the fifth lens group G5 and the sixth lens group G6 have positive refractive powers, and the second lens group G2 and the fourth lens group G4 have negative refractive powers.
[0019] The first lens group G1 includes two lenses L1-L2, wherein the l...
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