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Film forming apparatus, evaporating jig and measuring method

A technology of film forming device and measurement method, which is applied in vacuum evaporation plating, metal material coating process, coating, etc., can solve problems such as difficult temperature rise, temperature spots in temperature distribution, and poor thermal conductivity of liquid organic EL raw materials. To achieve the effect of improving utilization efficiency

Inactive Publication Date: 2008-09-17
TOHOKU UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, because the thermal conductivity of the liquid organic EL raw material is poor, the temperature in the evaporating dish is different due to the position of the liquid raw material, that is, the temperature is high near the heated evaporating dish, and the temperature is difficult to rise in the central part, resulting in a high temperature. distribution and even temperature spots
Since the vaporization amount of the evaporating pan changes sensitively due to temperature, this is also one of the reasons why the uniform concentration (evaporation amount) cannot be maintained

Method used

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  • Film forming apparatus, evaporating jig and measuring method
  • Film forming apparatus, evaporating jig and measuring method
  • Film forming apparatus, evaporating jig and measuring method

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Embodiment Construction

[0112] figure 1 Shown is a schematic view of a film forming apparatus according to a first embodiment of the present invention. The film forming apparatus shown in the figure includes an organic EL source unit 20, first and second film forming units 26, 27, and a switching unit 29 (switching mechanism). The organic EL source unit 20 has a plurality of organic EL sources. The part 29 is for selectively supplying the vaporized organic EL material from the organic EL source part 20 to the first or second film forming parts 26 and 27 . The switching unit 29 is composed of pipes, orifices, a mass flow controller (flow control system), a plurality of valves, and the like. With this relationship, the switching unit 29 is controlled by a control device (not shown) that controls piping, orifices, flow rate control systems, and valves.

[0113] Specifically, the illustrated organic EL source unit 20 includes a container portion (hereinafter referred to as a “raw material container por...

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Abstract

Provided are an evaporating jig by which a thin film, especially an organic EL film, can be uniformly formed over a long time, and a film forming apparatus including the evaporating jig. The evaporating jig is provided with an evaporating pan, having a bottom plane and side planes arranged to stand from the bottom plane, for defining a material containing space opened inside the side planes; and partitioning plates for partitioning the material containing space into a plurality of partial spaces. The partitioning plates are provided with locking pieces having a height which permits the partial spaces to be continuous on a bottom plane side of the evaporating pan.

Description

technical field [0001] The present invention relates to a film-forming device for forming a predetermined material layer, a jig for the film-forming device, and a measuring method using the jig, in particular to a film-forming device for forming a predetermined material layer after vaporizing a raw material of a predetermined material. A jig for a film-forming device, and a measurement method using a jig. Background technique [0002] A method of vaporizing a raw material of a predetermined material to form a film of a predetermined material layer is widely used in the manufacturing process of semiconductor materials, flat panel display devices, and other electronic devices. As an example of such an electronic device, an organic EL display device will be described below as an example. An organic EL display device with sufficient brightness and a life span of tens of thousands of hours or more uses a self-luminous element, that is, an organic EL element. Since the organic EL...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/12
CPCC23C14/243C23C14/246C23C14/12C23C14/548
Inventor 大见忠弘松冈孝明中山尚三伊藤日艺
Owner TOHOKU UNIV
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