III-V family metal oxide semiconductor luminous fieldistor and method for producing the same
A field effect transistor and oxide semiconductor technology, applied in the field of III-V metal oxide semiconductor light emitting field effect transistor and its preparation, can solve the problem of low luminous efficiency of the light emitting transistor, and achieve convenient control, high luminous efficiency, high luminous efficiency and the like. effect of brightness
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[0025] The MOS field effect transistor is prepared by using III-V compound material GaN material. A MOS type light emitting field effect transistor adopts a sapphire substrate and is composed of a source, a gate, an active light emitting region and a drain. Form a buffer layer 2 on a sapphire material substrate 1, then form an n-type semiconductor layer 3, continue to grow a multi-quantum well active light-emitting layer 9 and a p-type doped drain region 10, and finally form an epitaxial wafer. Then the semiconductor layer 3 is etched to form a step structure, and the left region of the step adopts an ion implantation method to manufacture a p-type semiconductor gate region 6, and then MgO is deposited on the p-type gate region 6 as a gate oxide layer 7 and a gate metal electrode 8, The right end of the n-type semiconductor layer 3 is the n-type source region 4 , on the n-type source region 4 is the source electrode 5 , and the drain region ohmic contact drain 11 .
[0026] T...
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