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Triaxial heat convection acceleration sensor

A technology of acceleration sensor and temperature sensor, which is used in acceleration measurement using inertial force, navigation through speed/acceleration measurement, instruments, etc., can solve the problem of unpublished three-axis thermal convection acceleration sensor, and achieve low cost and small size. , the effect of uniform heating

Active Publication Date: 2008-01-16
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The currently disclosed gas-sensitive acceleration sensors generally only have two types of uniaxial and biaxial, and the three-axis thermal convective acceleration sensor with a single sensitive element has not yet disclosed the technology

Method used

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  • Triaxial heat convection acceleration sensor

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Effect test

Embodiment 1

[0022] As shown in Figure 1, Figure 2, and Figure 3. The three-axis thermal convection acceleration sensor of the present invention includes a closed cavity 7, a heater 3, and a temperature sensor that are provided with sensitive elements inside. Inside cavity 7. The substrate structure of the triaxial thermal convection acceleration sensor of the present invention is composed of a silicon substrate 1, and the acceleration sensor is composed of three layers, which are bonded together by bonding technology after they are manufactured respectively. The first and third layers are respectively two pairs of Z-axis thermistors 2; the front and back of the second layer are two pairs of Y-axis thermistors 6, and the left and right are two pairs of X-axis thermistors 4. The heater is the heating resistor 3, which is located at the center of the second layer and also the center of the closed cavity 7; the temperature sensors on the three axes of X, Y, and Z are equidistant and symmetri...

Embodiment 2

[0025] The difference between this embodiment and Embodiment 1 is that the temperature sensors in the X, Y, and Z axes are respectively a pair of thermopiles, and the thermopiles are connected to the external temperature detection circuit through lead wires.

Embodiment 3

[0027] The difference between this embodiment and Embodiment 1 is that the heating resistor is circular, and the lead wires of the heating resistor are arranged in the diameter direction of the circle.

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Abstract

The invention discloses a triaxial heat convection accelerated speed sensor which belongs to the micromechanical sensor field; the triaxial heat convection accelerated speed sensor comprises a closed cavity equipped with a sensing element in the internal part, a heater and a temperature sensor; the heater and the temperature sensors in the three axial directions are equipped in the closed cavity; the sensing element is a gas limited in the closed cavity; the heater is positioned in the center of the closed cavity; three temperature sensors with the same characteristic value are symmetrically provided in the X axial direction, the Y axial direction and the Z axial direction; a single gas is used as the sensing element which can sense the accelerated speeds in the three axial directions. The accelerated speed sensor in the invention can be used in a plurality of occasions to sense the accelerated speed in any direction in a space; the invention has the advantages of simple, convenience, small volume, low cost, and big reliability.

Description

technical field [0001] The invention relates to an acceleration sensor, in particular to a three-axis thermal convection acceleration sensor applied in the field of micromechanical sensing. Background technique [0002] The acceleration sensor can measure physical quantities such as acceleration, velocity, displacement and inclination, and is a widely used inertial sensor. However, the application of acceleration sensors manufactured by traditional machining methods is greatly limited due to their large volume, high quality, and high cost. In recent years, the micro-acceleration sensor developed by micro-machining technology is a typical MEMS (Micro Electro Mechanical System abbreviated as MEMS) device, which overcomes the shortcomings of traditional acceleration sensors and brings great convenience to system design. It has become a hot spot in the field of micromechanical research. Micro-acceleration sensors have the advantages of small size, high sensitivity, and low cos...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08G01C21/16G01K7/24G01K7/02
Inventor 杨拥军徐淑静吕树海
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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