Method for depositing tin oxide base thin film on mobile hot glass surface

Abstract

The process of depositing tin oxide-base film onto the surface of moving hot glass includes the following steps: 1. fixing one chemical vapor reactors with three gas inlets and three gas outlets over the moving hot glass; 2. introducing the gas mixture of gaseous silica precursor and the carrier gas through the first gas inlet; 3. introducing the gas mixture of gaseous tin oxide precursor and the carrier gas through the second gas inlet; and 4. introducing the gas mixture of gaseous fluorine or antimony precursor and the carrier gas through the third gas inlet. The present invention can form a film structure with gradually changed refractivity, and the prepared tin oxide-base film has low radiation, no optical interference color and high chemical stability, may be cold processed and hot processed like common glass, and may find wide application in energy saving building, refrigerator, roaster, photoelectronic device, etc.

Description

technical field [0001] The invention relates to a method for depositing a tin oxide-based low-radiation function thin film on the surface of moving hot glass, more precisely, using the normal pressure chemical vapor deposition method to deposit low-radiation function and no optical interference on the surface of moving hot glass Color tin oxide based functional thin film. Background technique [0002] Tin oxide-based low-emissivity coated glass has good reflection ability for mid- and far-infrared electromagnetic waves, but directly coating low-emissivity film on the glass surface, due to the difference in refractive index between the glass and the low-emissivity functional film, it is easy to produce optical interference color, which has a low impact The optical effect of radiation-coated glass, and because of the enrichment of alkali metal ions on the glass surface, affects the conductivity of the tin oxide-based low-E coating, thereby restricting the low-E performance of ...

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Problems solved by technology

[0004] For example, the Chinese invention patent CN1145882A describes a glass coating method. This invention adopts a one-in-one-out reactor structure to deposit tin oxide-based low-emissivity functional films on a moving glass substrate at 630-640°C. There is no mention of the suppression of optical interference colors; Chinese invention patent CN1228067A introduces the chemical vapor deposition method of depositing tin oxide or titanium dioxide coatings on hot flat glass using organic oxygen compounds and corresponding metal tetrachlorides and the obtained glass, This patent does not involve the description of the shielding layer; the Chinese invention patent CN1425620A introduces the method of producing low-emissivity glass on-line by float method. 1.80 A borosilicate film with a thickness of about 40-90nm is used as a shielding layer; Chinese invention patent CN1792926A relates to an online coating device for float glass, which can be used to produce high-quality and multi-functional coated glass online, but the invention does not have It involves a specific method of coating a tin oxide-based low-emissivity film with low-emissivity function and no optical interference color on a moving hot glass plate, and the device does not mention the filtration of reactive gases; Chemical Industry Press The book "Low-E Glass and Its Application" published by China Press in 2006 systematically discusses the film-forming mechanism, film structure and function of low-E glass, and also introduces the online and offline production methods of low-E glass, but the book It does not involve specific film-forming equipment such as chemical gas phase reactors

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