Uniaxle integrated inertia measurement device based on single mass-block

Abstract

The present invention which relates to the micro-mechanism electric technology provides a single-shaft and integrated device for measuring the inertia based on the single quality block. And the present solves the problems of the prior single-shaft and integrated assembly for measuring the inertia that the structure is complex, the volume and quality are big, etc. The single-shaft and integrated device for measuring the inertia includes a quality block and a glass cover bottom. The quality block which is hang on the upper of the glass cover bottom through a supporting beam includes a quality chip and four supporting bodies that are fixed with the four sides of the quality chip through the elastic beam. A moveable comb for detecting is fixed on the external of the supporting body relative to the Y direction and a moveable comb for driving is fixed on the external of the supporting body relative to the X direction. A fixed comb for detecting and a fixed comb for driving are fixed on the glass cover bottom, and electrodes for forming the capacitance are fixed on the lower end surface and the glass cover bottom of the quality chip. The device in the present invention has advantages of a reasonable structure, an easy processing, a high reliability, a small volume, a strong ability of resisting the interference, a high precision, a high precision of measuring the paralleling and orthogonality of the vectors, etc.

Description

technical field [0001] The invention relates to micro-mechanical electronic technology, in particular to a single-axis integrated inertial measurement device based on a single mass block. Background technique [0002] At present, there are usually two combinations of silicon micro-inertial measurement combinations: one is to install six single-axis inertial sensors (that is, three accelerometers and three gyroscopes) in several orthogonal cubes as required by mechanical assembly. On the surface, it can be called multi-chip integration. Among them, each inertial sensor is relatively independent and can be flexibly selected according to needs; but this method is not suitable for mass production and the sensitive axes of each sensor will not be completely orthogonal due to installation, which will affect the attitude calculation; the other is through a microfabrication The process processes the required multiple silicon micro inertial sensors on the silicon chip at the same ti...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of the existing micro-inertial measurement combination assembled by an accelerometer and a gyroscope (that is, a single-axis micro-inertial measurement combination), the present invention provides a single-mass based Block Single-Axis Integrated Inertial Measurement Devices

Images