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Colour-developing solvent for detecting sorting waste silicon material

A solvent and silicon material technology, which is applied in the direction of chemical reaction of materials and material analysis by observing the impact on chemical indicators, can solve the problems of difficult detection, uneconomical production, and a large number of detectors. , to save investment, improve sorting efficiency and accuracy, and reduce production costs

Inactive Publication Date: 2007-08-22
ZHEJIANG YUHUI SOLAR ENERGY SOURCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the detection of waste silicon materials is mainly carried out manually one by one, which requires a large number of detectors and labor, making the solar silicon material recycling industry a labor-intensive industry
For some waste silicon materials with small particle size, it is more difficult to detect and the efficiency is lower; moreover, missed detection and insufficient detection key points will greatly reduce the accuracy of detection, and re-inspection is required, resulting in lower efficiency , lower accuracy
In addition, for the silicon material that is rich in impurities at the bottom of the crucible, in addition to testing the resistivity, ICP purity analysis is also required for each piece of the bottom material, which is very costly and does not meet the needs of economical production.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] ①At room temperature of 20°C, in the acid-resistant tank of the fume hood, prepare the color developing solvent according to the following ratio: HF:HNO 3 :CH 3 COOH:H 2 O=1:3:8:5, wherein the concentration of each component solution is as follows: hydrogen fluoride HF48%, nitric acid HNO 3 72%, CH acetate 3 COOH99%, pure water, a total of 17 liters;

[0025] ② The surface-cleaned P-type crushed silicon wafers containing heavy doping, with a thickness of 220-800 microns and a particle size of 5-80 mm, weighed 1.7 kg and put them into an acid-resistant basket;

[0026] ③ Then put it into the acid tank for soaking, and stir it gently with an acid-resistant plastic stick;

[0027] ④ After 5 minutes, the heavily doped silicon material changes color, and the P-type resistivity is less than 0.5Ω.cm The heavy doped material turns dark blue, and then remove the basket;

[0028] ⑤ After taking out the basket, rinse off the residual acid with water, and use PH test paper to ...

Embodiment 2

[0032] Under the condition of 20°C, in the acid-resistant tank of the fume hood, prepare the chromogenic solvent according to the following ratio: HF:HNO 3 :CH 3 COOH:H 2 O=1:3:7:6, wherein the concentration of each component solution is as follows: hydrogen fluoride HF49%, nitric acid HNO 3 68%, CH acetate 3 COOH98.5%, pure water. Other content of this embodiment is the same as that of Embodiment 1.

Embodiment 3

[0034] Under the condition of 20°C, in the acid-resistant tank of the fume hood, prepare the chromogenic solvent according to the following ratio: HF:HNO 3 :CH 3 COOH:H 2 O=1:3:9:6, wherein the concentration of each component solution is as follows: hydrogen fluoride HF48.5%, nitric acid HNO 3 68.5%, CH acetate 3 COOH98%. Other content of this embodiment is the same as that of Embodiment 1.

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PUM

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Abstract

The invention belongs to testing technology of semiconductor silicon, especially relates to a coloration solvent for testing grade abandoned silicon. Its density is composed of 48-50% hydrogen fluoride solution, 68-72% nitric acid, 98-99% acetum and pure water, which are matched with the following volume ratio: hydrogen fluoride solution: nitric acid: acetum: pure water=1:3:6-9:4-6. Coloration solvent prepared using this method can separate low-density impure qualified materials from high-density impure heavy doped materials quickly without testing silicon one by one manually, which improves grading efficiency and accuracy, saves costly investment in testing apparatuses and reduces production cost.

Description

technical field [0001] The invention belongs to the technical field of semiconductor silicon material detection, and in particular relates to a chemical chromogenic solvent for detecting and sorting waste silicon materials. Background technique [0002] With the rapid development of modernization, the demand for energy is increasing day by day, and energy shortage has become a global problem. In order to alleviate the energy crisis, many renewable energy sources have been vigorously developed, such as the application of solar energy to emerge like mushrooms after rain. However, the wide application of solar devices has made the raw material supply of solar-grade silicon wafer materials increasingly tight, so the recycling of waste silicon materials has become an important source of solar silicon materials. Since the recovered silicon waste is rich in impurities, it must be detected and qualified materials must be sorted. At present, the detection of waste silicon materials...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/78
Inventor 吴云才刘磊磊
Owner ZHEJIANG YUHUI SOLAR ENERGY SOURCE
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