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Method for making Nano microstructure based on constant force mode of atomic force microscope

An atomic force microscope and microstructure technology, applied in nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as limited size range, and achieve the effects of overcoming poor repeatability positioning accuracy, suppressing system drift, and high positioning accuracy

Inactive Publication Date: 2007-07-25
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a nano-microstructure processing method based on the constant force mode of the atomic force microscope, so as to overcome the defect that the existing AFM nano-microstructure processing method can accurately process a very limited size range, and can realize design Scribing at a fixed depth

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  • Method for making Nano microstructure based on constant force mode of atomic force microscope
  • Method for making Nano microstructure based on constant force mode of atomic force microscope

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specific Embodiment approach 1

[0008] Specific Embodiment 1: The present embodiment will be specifically described below with reference to FIG. 1 , FIG. 3 and FIG. 4 . The system of the inventive method comprises computer 3, main single-chip microcomputer 4, display and keyboard 5, AFM scanning pottery tube drive circuit 8, AFM microcantilever processing system 9 and AFM scanning pottery tube detection circuit 10, AFM microcantilever processing system 9 includes scanning pottery tube Pipe 9-1, cantilever 9-2, probe 9-3, optical lever angle measuring device 9-4 and PID constant force servo control circuit 9-5, the communication port of computer 3 connects a communication port of main single-chip microcomputer 4, the main Another communication port of the single-chip microcomputer 4 is connected to the communication port of the display and the keyboard 5, an output end of the main single-chip microcomputer 4 is connected to an input end of the AFM micro-cantilever processing system 9, and an output end of the ...

specific Embodiment approach 2

[0012] Specific Embodiment 2: The present embodiment will be specifically described below with reference to FIG. 2 . The difference between this embodiment and Embodiment 1 is that its system also includes a power supply 20, the positive and negative poles of the power supply 20 are respectively connected to the probe 9-3 and the workpiece 11 to be processed, and the voltage amplitude of the power supply 20 is less than 10V, which is continuous The pulse time is 500ms. This function is another function added to the scoring function. The probe 9-3 and the workpiece 11 to be processed apply a voltage signal set by the user, and the voltage signal is isolated from other parts of the system, so that the needle tip-induced localized oxidation process and the needle-point-induced localized modification process of the processed workpiece 11 can be realized.

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Abstract

A process based on the constant-force mode of atomic force microscope for preparing nano-class microstructure with controllable depth and large range of precise sizes features that 2D micro-motion bench and its control circuit is additionally used. The extension of scanning ceramic tube is driven by AFM driver circuit to make the probe tip to prick into the surface of a workpiece to be processed. The variation amount of scanning ceramic tube is detected by the real-time detection circuit and transmitted to single-chip computer. Said scanning ceramic tube is extended continuously in the relative direction until the processed depth setting is equal to the difference between the motion amount of said scanning ceramic tube in height direction and said deformation amount of cantilever.

Description

technical field [0001] The invention relates to a processing method of a nanoscale microstructure. Background technique [0002] In 1982, Gerd Binnig and Heinrich Roher of IBM invented the first scanning tunneling microscope (STM), and in 1983 they successfully observed the Si(7×7) atomic distribution image on the Si(111) surface. Subsequently, scientists invented a series of nanoscale surface detection instruments using probes as tools on the basis of STM. In 1986, Gerd Binnig and others invented the atomic force microscope (AFM) on the basis of STM. It solves the problem that STM has high requirements on the environment and samples, and greatly broadens the scope of application. The invention of laser deformation detection technology in 1988 and the successful batch production of microprobes by Stanford University in the United States in 1989 further improved the stability of AFM and greatly promoted the application of AFM in various fields. In recent years, combined wi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00
Inventor 孙涛胡振江闫永达赵学森董申
Owner HARBIN INST OF TECH
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