Method for detecting silicon chip edge automatically
An automatic detection, silicon wafer technology, applied in the direction of semiconductor/solid-state device testing/measurement, etc., can solve the problems of inability to accurately locate the detection point, poor data analyzability, poor efficiency and accuracy, etc., to improve detection and monitoring efficiency, Improved analyzability, enhanced accuracy
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[0020] see figure 1 , the method for monitoring silicon chip edge of the present invention comprises the steps:
[0021] In the first step, the silicon wafer is scanned by an automatic defect detector, and the scanning result is saved as a file in KLARF format. When the automatic defect detector scans the silicon wafer, it can record the size and coordinates of each real defect on the silicon wafer.
[0022] In the second step, a virtual wafer is added to the KLARF file saved in the first step, and the virtual wafer completely covers the edge of the entire silicon wafer. After the virtual wafer is added, the total area covered by the actual wafer and the virtual wafer of the KLARF file is larger than the actual area of the silicon wafer.
[0023] The third step is to calculate the coordinates of the detection points on the edge of the silicon wafer in the coordinate system adopted by the KLARF file. The coordinate system used in the KLARF file is customized by the automat...
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