Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Coating machine nozzle cleaning module and its device

A technology for cleaning devices and coating machines, applied in cleaning methods and utensils, photoplate-making process coating equipment, chemical instruments and methods, etc., can solve problems such as incomplete cleaning of nozzles, and achieve the effect of improving production yield

Inactive Publication Date: 2009-12-23
AU OPTRONICS CORP
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this cleaning method still has the problem of not completely cleaning the nozzle

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Coating machine nozzle cleaning module and its device
  • Coating machine nozzle cleaning module and its device
  • Coating machine nozzle cleaning module and its device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0039] The invention provides a coating machine nozzle cleaning module and its device for thoroughly cleaning the coating machine nozzle to reduce the occurrence of problems and improve the production yield. The coating machine nozzle cleaning module and device thereof of the present invention can solve the gel problem generally existing in the coating machine, so as to improve the production yield. The coating machine nozzle cleaning module and its device of the present invention are preferably used in conjunction with cleaning materials with high elasticity, softness and adsorption. When the cleaning material is between the tip of the nozzle and the cleaning part, it will automatically conform to the nozzle due to elasticity. The shape of the tip absorbs the excess photoresist at the tip of the nozzle, which can strengthen the cleaning effect of the nozzle and reduce the probability of gel generation.

[0040] The cleaning material used in the nozzle cleaning module of the c...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a coating machine nozzle cleaning module and its device, which are used in conjunction with the coating machine nozzle, and include a cleaning part and a feeding part, the cleaning part has a seat part, and a cleaning surface is arranged on the seat part; the feeding part has a propulsion device , for feeding cleaning material to the cleaning surface, wherein when the nozzle of the coating machine passes through the cleaning surface, the tip of the nozzle of the coating machine contacts the cleaning material and abuts against the seat, and the cleaning material passes through the cleaning surface at an angle to the horizontal, the angle Between 1 degree and 7 degrees.

Description

technical field [0001] The invention relates to a coating machine cleaning module, in particular to a coating machine nozzle cleaning device in an optical process flow (photoprocess), in which the coating machine nozzle is cleaned. Background technique [0002] In the display manufacturing process, there is a common problem of gel in the photoresist coating machine (slit coater). When the tip of the nozzle (nozzle) is not clean when coating, it will form defects and seriously affect Product yield. Generally, before the photoresist coating of each product, rubber (rubber) is used as the cleaning material for the tip of the nozzle. However, since the precision of the rubber cannot completely match the nozzle, it is impossible to effectively clean the nozzle of the photoresist coating machine. In addition, the rubber has poor water absorption, and the excess photoresist liquid cannot be removed by cleaning the nozzle with rubber, and it will remain on the nozzle in the end. Th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/16B08B13/00
Inventor 朱益新
Owner AU OPTRONICS CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com