Coating machine nozzle cleaning module and its device

A technology for cleaning devices and coating machines, applied in cleaning methods and utensils, photoplate-making process coating equipment, chemical instruments and methods, etc., can solve problems such as incomplete cleaning of nozzles, and achieve the effect of improving production yield

Inactive Publication Date: 2009-12-23
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this cleaning method still has the problem of not completely cleaning the nozzle

Method used

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  • Coating machine nozzle cleaning module and its device
  • Coating machine nozzle cleaning module and its device
  • Coating machine nozzle cleaning module and its device

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Embodiment Construction

[0039] The invention provides a coating machine nozzle cleaning module and its device for thoroughly cleaning the coating machine nozzle to reduce the occurrence of problems and improve the production yield. The coating machine nozzle cleaning module and device thereof of the present invention can solve the gel problem generally existing in the coating machine, so as to improve the production yield. The coating machine nozzle cleaning module and its device of the present invention are preferably used in conjunction with cleaning materials with high elasticity, softness and adsorption. When the cleaning material is between the tip of the nozzle and the cleaning part, it will automatically conform to the nozzle due to elasticity. The shape of the tip absorbs the excess photoresist at the tip of the nozzle, which can strengthen the cleaning effect of the nozzle and reduce the probability of gel generation.

[0040] The cleaning material used in the nozzle cleaning module of the c...

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Abstract

The invention discloses a coating machine nozzle cleaning module and its device, which are used in conjunction with the coating machine nozzle, and include a cleaning part and a feeding part, the cleaning part has a seat part, and a cleaning surface is arranged on the seat part; the feeding part has a propulsion device , for feeding cleaning material to the cleaning surface, wherein when the nozzle of the coating machine passes through the cleaning surface, the tip of the nozzle of the coating machine contacts the cleaning material and abuts against the seat, and the cleaning material passes through the cleaning surface at an angle to the horizontal, the angle Between 1 degree and 7 degrees.

Description

technical field [0001] The invention relates to a coating machine cleaning module, in particular to a coating machine nozzle cleaning device in an optical process flow (photoprocess), in which the coating machine nozzle is cleaned. Background technique [0002] In the display manufacturing process, there is a common problem of gel in the photoresist coating machine (slit coater). When the tip of the nozzle (nozzle) is not clean when coating, it will form defects and seriously affect Product yield. Generally, before the photoresist coating of each product, rubber (rubber) is used as the cleaning material for the tip of the nozzle. However, since the precision of the rubber cannot completely match the nozzle, it is impossible to effectively clean the nozzle of the photoresist coating machine. In addition, the rubber has poor water absorption, and the excess photoresist liquid cannot be removed by cleaning the nozzle with rubber, and it will remain on the nozzle in the end. Th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/16B08B13/00
Inventor 朱益新
Owner AU OPTRONICS CORP
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