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Method for measuring optical parameter of film on coated glass

A technology of coated glass and thin film optics, which is applied in the direction of testing optical properties, measuring devices, and material analysis by optical means, can solve the problems of high cost, demanding experimental conditions, and complicated measuring means, and achieves low cost and simple establishment. Reliable, stable measured value effect

Active Publication Date: 2009-09-09
ZHEJIANG UNIV
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Problems solved by technology

The interferometric method can use the multiple peaks and valleys that appear on the spectral curve to estimate the thickness and refractive index of the film more conveniently, but the thickness of the film generally needs to be more than a few hundred nanometers before multiple interference peaks and valleys appear, so the thickness of the film is generally Coated glass with a thickness of about 100 nanometers, such as solar control coated glass, is not applicable
The measurement results of ellipsometry are fast and accurate, but the measurement methods are complicated, the experimental conditions are harsh, and the cost is high

Method used

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  • Method for measuring optical parameter of film on coated glass
  • Method for measuring optical parameter of film on coated glass
  • Method for measuring optical parameter of film on coated glass

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with accompanying drawings and examples.

[0019] Taking online solar control coated glass as an example, the film layer 1 is a silicon-based thin film, and the substrate 2 is ordinary white glass. figure 1 As shown in the figure, I is the incident light, R is the reflected light, and T is the transmitted light. Measuring the visible light transmission T of the coated glass under the state of normal incidence m and reflectance spectrum R m Such as figure 2 As shown, the dots and square dots represent T m and R m . Calculate the transmittance T of light perpendicularly incident on the surface of the film by matrix method c and reflectance R c The following formula:

[0020] T c ( λ ) = 4 n s ...

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Abstract

The invention relates to a method for measuring the optical parameters of a coated glass film, comprising the following steps: establishing the functional relationship between the film thickness h, the refractive index n, the extinction coefficient k and the film transmittance and reflectivity, and the measured visible light transmission and reflection of the coated glass The spectra are combined to form a curve fitting problem, and the two-step method combining simulated annealing method and Newton iterative method is used to solve this curve fitting problem, so as to obtain the measurement results of the optical parameters of the thin film. Compared with the existing corresponding technology, the invention is more suitable for the measurement of the coated glass thin film, has fast and accurate measurement effect, stable measurement result, simple method and low cost.

Description

technical field [0001] The invention relates to a method for measuring the optical parameters of a coated glass film, in particular to a method for obtaining the optical parameters of the film by using visible light transmission and reflection spectrum fitting, and belongs to the field of material processing engineering parameter measurement. Background technique [0002] Coated glass is coated with one or more layers of metal, metal oxide or other inorganic materials on the glass surface to change the optical properties of the glass to meet certain specific requirements. Therefore, measuring the optical parameters of the coated glass film, namely thickness, refractive index and extinction coefficient, is very important for detecting the quality of coated glass, improving the coating control process, improving the performance of coated glass, realizing the automatic control of the interaction between film performance and process parameters, and the relationship between film l...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/00G01M11/02
Inventor 韩高荣刘涌宋晨路汪剑勋刘军波刘起英
Owner ZHEJIANG UNIV
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