Sticking device of substrates, judging method for substrates sticking, and method for substrates sticking

Abstract

In a vacuum atmosphere, substrates 31 and 32 to be stuck together discharge gas to lower the vacuum in the chamber 1. When the upper and lower substrates 31 and 32 are properly stuck together via the sealing material 6 applied in a frame shape, gas discharged from the substrate surfaces enclosed with the sealing material 6 is not diffused in the chamber, so the pressure in the chamber 1 abruptly falls, so that a high vacuum is produced. For the purpose, a sensor (pressure detector) 12 which detects the vacuum in the chamber 1 is provided in the present invention and a controller 7 finds an inflection point P where the pressure in the chamber 1 abruptly changes to detect the two substrates 31 and 32 being properly stuck together while the sealing material 6 spreads over the entire region. The simple constitution, therefore, eliminates an unnecessary depression fall of the upper substrate 31 during the sticking process to shorten the tact time of the sticking process.

Description

technical field [0001] The present invention relates to a substrate pasting device suitable for use in the manufacture of liquid crystal display panels, a substrate pasting judging method and a substrate pasting method. Background technique [0002] Liquid crystal display panels are manufactured by sealing liquid crystals between glass substrates, and there are two types of liquid crystal sealing: injection type and drop type. [0003] The manufacturing process of the liquid crystal drop type liquid crystal display panel: the pasting process of pasting the two substrates with a sealant in a depressurized room represented by a vacuum environment, and using the internal and external pressure difference between the indoor pressure after the pasting and returning to the atmospheric pressure. The step of forming a predetermined interval between the substrates is the gap generation step. [0004] In the former substrate bonding process in a vacuum environment, the two substrates ...

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Problems solved by technology

[0009] However, in the case of a large substrate, the application length of the sealant becomes longer naturally, so it is difficult to accurately detect that the distance between two substrates is within the specified range within the entire application area of ​​the sealant

[0010] In addition, in the existing substrate pasting device, in order to detect whether the two substrates are properly pasted through the sealant, it is necessary to install a plurality of distance measuring devices along the outer peripheral edge of the pasted substrates, so that the structure cannot be avoided.

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