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Variable capacitor and differential variable capacitor

A capacitor and differential technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problem of insufficient modulation range and achieve the effect of quality factor improvement and large modulation range

Active Publication Date: 2007-12-05
UNITED MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of this, the object of the present invention is to provide a variable capacitor to solve the problem that the capacitance or voltage modulation range of the existing variable capacitor is not large enough

Method used

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  • Variable capacitor and differential variable capacitor

Examples

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no. 1 example

[0033] As shown in FIG. 1 , it shows a schematic cross-sectional view of a variable capacitor according to a preferred embodiment of the present invention. Referring to FIG. 1 , the variable capacitor of the present invention includes an n-type substrate 100 , two gate structures 102 , 104 , a p-type doped region 106 and an n-type doped region 110 . In a preferred embodiment, the variable capacitor further includes a p-type lightly doped region 108 , an n-type lightly doped region 112 , a spacer 114 and a metal silicide layer 116 .

[0034] The two gate structures 102 and 104 are disposed on the n-type substrate 100 , and each gate structure 102 and 104 is composed of a lower gate dielectric layer 118 and an upper gate conductive layer 120 . Moreover, the two gate structures 102 and 104 may also be disposed on a p-type substrate (not shown) having an n-type well region (not shown) in addition to being disposed on the n-type substrate 100 . In addition, the material of the gat...

no. 2 example

[0044] As shown in FIG. 3 , it shows a schematic cross-sectional view of a differential variable capacitor according to a preferred embodiment of the present invention, which is a variation application of the single variable capacitor of the first embodiment. Referring to FIG. 3, the differential variable capacitor of the present invention is composed of at least one pair of variable capacitors 200 disposed on an n-type substrate 202, and each pair of variable capacitors 200 includes a variable capacitor 204a and a variable capacitor 204a. Capacitor 204b.

[0045] Wherein, the variable capacitor 204a includes two gate structures 208a, 210a, a p-type doped region 212a and an n-type doped region 216a. In a preferred embodiment, the variable capacitor 204a further includes a p-type lightly doped region 214a, an n-type lightly doped region 218a, a spacer 220a and a metal silicide layer 222a.

[0046] The two gate structures 208a and 210a are disposed on the n-type substrate 202, ...

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Abstract

The invention consists of secondary type substrate, two grid structures, first doping region and second doping region. The two grid structures are set on the substrate, and each grid structure comprises grid dielectric layer and grid conducting layer. The first doping region is set on the substrate between two grid structures, and the second doping region is set in other substrate in first doping area where the two grid structures are not set. The two grid structures are connected with first electrode or second electrode. The invention includes MOS variable capacitor and resultant variable capacitor structure.

Description

technical field [0001] The present invention relates to a variable capacitor (Varactor), in particular to a variable capacitor and a differential variable capacitor (Differential Varactor) whose capacitance and voltage both have a large modulation range. Background technique [0002] In a typical communication system, information signals (for example: TV programs) are modulated (Tune) and placed on a high-frequency carrier to facilitate signal transmission. By virtue of the characteristics of different carrier signals at different frequencies, many information signals are propagated at the same time. Therefore, the receiver in the communication system needs to use a voltage controlled oscillator (Voltage Controlled Oscillator, VCO) to separate the information signal from the carrier. In a VCO, an LC (inductor-capacitor) circuit composed of a variable capacitor and an inductor is included. The oscillation frequency of the VCO can be changed accordingly by virtue of the char...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/94H01L29/93
Inventor 高境鸿
Owner UNITED MICROELECTRONICS CORP
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