Cooling device and multi-chamber heat treatment device

Abstract

A cooling device configured to cool an article to be treated by immersing the article to be treated in coolant includes a cooling chamber configured to accommodate the article to be treated and store the coolant therein, a supply nozzle configured to supply the coolant into the cooling chamber from below the article to be treated, a recovery pipeline configured to collect the coolant stored in the cooling chamber from above the article to be treated, and a pump configured to pump the coolant collected by the recovery pipeline to the supply nozzle.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]The present application is a continuation application of International Application No. PCT / JP2015 / 069889, filed Jul. 10, 2015, which claims priority to Japanese Patent Application No. 2014-152048, filed Jul. 25, 2014. The contents of these applications are incorporated herein by reference in their entirety.TECHNICAL FIELD[0002]The present disclosure relates to a cooling device and a multi-chamber heat treatment device.BACKGROUND[0003]For example, Patent Document 1 discloses a multi-chamber heat treatment device including three heating devices and a single cooling device. In the multi-chamber heat treatment device, the heating devices and the cooling device are connected via intermediate conveyance chambers, and for example, an article to be treated heated by the heating devices is conveyed to the cooling device and cooled therein. In such a cooling device, for example, cooling of the article to be treated is performed by storing a coolant...

AI Technical Summary

Benefits of technology

This patent is about a cooling device and heat treatment device for articles. The device creates a flow of coolant from below to above the article, which prevents turbulence and allows for efficient cooling of the article. The coolant is supplied from below, collected from above, and pumped back to the supply nozzle, ensuring a continuous flow. This results in a uniform cooling of the article. The device also prevents the coolant from being heated before reaching the article, resulting in efficient cooling. Therefore, this patent provides a technical solution for cooling articles in a cooling chamber with a flow of coolant that is efficient, uniform, and without turbulence.

Problems solved by technology

For this reason, in the above-mentioned method, a flow of the coolant supplied into the cooling chamber from the nozzle and a flow of the coolant that is heated to flow upward interfere with each other, the flow of the coolant in the cooling chamber becomes turbulent, and thus it is difficult to uniformly cool the article to be treated.

In addition, since the coolant supplied from the nozzle is heated before arrival at the article to be treated, it is difficult to efficiently cool the article to be treated.

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