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Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method

a technology of movable body and drive method, which is applied in the direction of photomechanical equipment, instruments, printers, etc., can solve the problems of short-term variation of measurement values, inability to ignore the beam path of laser interferometer, and the measurement accuracy of the encoder system to decline, so as to achieve high accuracy and highly precise exposure of objects

Active Publication Date: 2013-11-07
NIKON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

The patent describes an apparatus and method for accurately driving a movable body and transferring a pattern on an object by using a laser beam. The apparatus measures the position of the movable body and the shape of the arm member that holds the laser beam, and uses this information to correct measurement errors caused by the arm member. This ensures that the movable body is driven with good precision, and the pattern can be transferred accurately on the object. The technical effects of this invention include improved accuracy in pattern transfer and exposure, as well as improved efficiency in the manufacturing process.

Problems solved by technology

However, requirements for a fine movement stage position control with higher precision are increasing due to finer patterns that accompany higher integration of semiconductor devices recently, and as a consequence, short-term variation of measurement values due to the influence of temperature fluctuation and / or temperature gradient of the atmosphere on the beam path of the laser interferometer can no longer be ignored.
However, in the exposure apparatus related to the fifth embodiment of PCT International Publication No. 2008 / 038752, because the encoder main body is provided at the stage surface plate supported by suspension by the projection optical system surface plate via the suspension support member, vibration during exposure of the exposure apparatus could travel to the stage surface plate via the projection optical system surface plate and the suspension support member, which could incline the optical axis of the encoder head, and cause the measurement accuracy of the encoder system to decline.

Method used

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  • Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
  • Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
  • Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method

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Embodiment Construction

[0037]An embodiment of the present invention will be described below, with reference to FIGS. 1 to 14B.

[0038]FIG. 1 shows a schematic configuration of an exposure apparatus 100 in the embodiment. Exposure apparatus 100 is a projection exposure apparatus by the step-and-scan method, or a so-called scanner. As it will be described later, a projection optical system Pt is arranged in the embodiment, and in the description below, a direction parallel to an optical axis AX of projection optical system Pt will be described as the Z-axis direction, a direction within a plane orthogonal to the Z-axis direction in which a reticle and a wafer are relatively scanned will be described as the Y-axis direction, a direction orthogonal to the Z-axis and the Y-axis will be described as the X-axis direction, and rotational (inclination) directions around the X-axis, the Y-axis, and the Z-axis will be described as θx, θy, and θz directions, respectively.

[0039]As shown in FIG. 1, exposure apparatus 100...

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Abstract

A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body and measurement results of a second measurement system which measures a variance of the arm member using a laser interferometer. In this case, the drive system corrects measurement errors caused due to a variance of the arm member included in the measurement results of the first measurement system, using the measurement results of the second measurement system.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This non-provisional application is a continuation of patent application Ser. No. 12 / 561,510, which claims the benefit of Provisional Application No. 61 / 098,900 filed Sep. 22, 2008 and Provisional Application No. 61 / 213,347 filed Jun. 1, 2009, the disclosure of which is hereby incorporated herein by reference in its entirety.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to movable body apparatuses, movable body drive methods, exposure apparatuses, exposure methods, and device manufacturing methods, and more particularly, to a movable body apparatus including a moving body which is movable along a predetermined plane and a movable body drive method to drive the movable body, an exposure apparatus which is equipped with the movable body apparatus and an exposure method which uses the movable body drive method, and a device manufacturing method which uses the exposure apparatus or the exposure ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G03F7/20G03F7/30
CPCG03F7/70775G03F7/7085Y10T29/49009G03F7/70725G03F7/708G03F7/30H01L21/0274
Inventor SHIBAZAKI, YUICHI
Owner NIKON CORP
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