Magnetic annealing tool heat exchange system and processes

a technology of heat exchange system and magnetic annealing tool, which is applied in the direction of magnetic bodies, lighting and heating apparatus, furnaces, etc., can solve the problems of insufficient flexibility to control and vary the heating and cooling steps independently and efficiently, affecting the annealing cycle, and affecting the cooling effect of workpieces

Inactive Publication Date: 2008-05-29
MAGNETIC SOLUTIONS HLDG
View PDF7 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these process heating and cooling steps are in direct conflict with one another and, therefore deleteriously affect the annealing cycle.
During cooling the hollow space is rapidly filled with gas, causing a drop in temperature and subsequent cooling.
Some of the disadvantages associated with the related art systems is that they are not sufficiently flexible to control and vary the heating and cooling steps independently and efficiently.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Magnetic annealing tool heat exchange system and processes
  • Magnetic annealing tool heat exchange system and processes
  • Magnetic annealing tool heat exchange system and processes

Examples

Experimental program
Comparison scheme
Effect test

examples

[0059] The particular processes described herein involve utilization of the system of the present invention, wherein an inert or reducing (i.e., non-oxidizing) atmosphere may be introduced to the process chamber at any stage in the anneal cycle / process. For instance, the heating and soaking steps may be carried out in a hard vacuum, while the cooling steps, may be carried out in a soft vacuum, a rough vacuum or a positive pressure (i.e., above 760 Torr) by introducing an inert or reducing atmosphere. The process conditions vary depending on the annealing cycle / process. Temperatures in the process chamber range from 200 to 1000° C., and the pressure will range from a hard vacuum (e.g., 10−7 Torr) to atmospheric conditions (e.g., 760 Torr). The workpieces can be processed in an inert atmosphere, a reducing atmosphere, or a vacuum. The gases employed can be hydrogen, helium, nitrogen, argon or any mixtures therefrom. The gases include in the cooling step (i.e., introduced into the elem...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a magnetic annealing tool heat exchange system which reduces the manufacturing cycle for the workpieces processed therein. The system provides an efficient heating and cooling cycle, as well as flexibility, as various components of the system can be independently controlled, depending on the process performed. [0003] 2. Description of Related Art [0004] Magnetic annealing is one of three processes that are required to manufacture a Magneto Resistive Random Access Memory (MRAM) chip on a standard Complementary Metal Oxide Semiconductor (CMOS). To successfully anneal an MRAM wafer, the ferromagnetic layer must be held at a predetermined temperature in a magnetic field for a period of time long enough for the crystals to orient themselves in a common direction upon cooling. The process, which is also referred to as “soak” is carried out in an inert, reducing or vacuum environment to pre...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(United States)
IPC IPC(8): H05B6/00
CPCH01L21/67109F27D15/02H01L21/324
Inventor JIBB, RICHARDBILLINGHAM, JOHNDUFFY, EDWARDO'SHAUGHNESSY, NOELMCMAHON, KEVINFERRIS, PETER
Owner MAGNETIC SOLUTIONS HLDG
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap