Plasma Nozzle Array for Providing Uniform Scalable Microwave Plasma Generation

Abstract

The present invention provides microwave plasma nozzle array systems (10, 70, 230, and 310) and methods for configuring microwave plasma nozzle arrays (37, 99, and 337). The microwaves are transmitted to a microwave cavity (323) in a specific manner and form an interference pattern (66) that includes high-energy regions (69) within the microwave cavity (32). The high-energy regions (69) are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements (36) is provided in the array (37). Each of the nozzle elements (36) has a portion (116) partially disposed in the microwave cavity (32) and receives a gas for passing therethrough. The nozzle elements (36) receive microwave energy from one of the high-energy regions (69). Each of the nozzle elements (36) includes a rod-shaped conductor (114) having a tip (117) that focuses on the microwaves and a plasma (38) is then generated using the received gas.

Description

CROSS REFERENCE TO RELATED APPLICATIONS [0001] This application is related to a concurrently filed PCT application Ser. No. ______, filed on Jul. 21, 2005, entitled “SYSTEM AND METHOD FOR CONTROLLING A POWER DISTRIBUTION WITHIN A MICROWAVE CAVITY” which is hereby incorporated by reference in its entirety.BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates to plasma generating systems, and more particularly to microwave plasma systems having plasma nozzle arrays. [0004] 2. Discussion of the Related Art [0005] In recent years, the progress on producing plasma has been increasing. Typically, plasma consists of positive charged ions, neutral species and electrons. In general, plasmas may be subdivided into two categories: thermal equilibrium and thermal non-equilibrium plasmas. Thermal equilibrium implies that the temperature of all species including positive charged ions, neutral species, and electrons, is the same. [0006] Plasmas may also ...

AI Technical Summary

Benefits of technology

"The present invention provides various systems and methods for configuring microwave plasma nozzle arrays. These systems and methods involve directing microwaves into a microwave cavity in opposing directions, adjusting the phase of the microwaves to control high-energy regions, and disposing an nozzle array in the cavity. The technical effects of this invention include improved plasma generation and control, as well as improved efficiency and reliability of the microwave plasma system."

Problems solved by technology

A low plasma pressure, on the other hand, may yield one or more temperatures for the plasma species due to insufficient collisions between the species of the plasma.

These technologies have a number of problems that must be dealt with and overcome and these include issues such as thermal sensitivity and destruction by heat, the formation of toxic byproducts, the high cost of operation, and the inefficiencies in the overall cycle duration.

Consequently, healthcare agencies and industries have long needed a sterilizing technique that could function near room temperature and with much shorter times without inducing structural damage to a wide range of medical materials including various heat sensitive electronic components and equipment.

The most of these designs are single nozzle based and they lack large volume scalability required for sterilization of medical devices applications.

Also, such plasma systems generate high temperature plasma, which is not suitable for sterilization applications.

One of the challenging problems of such a system is controlling the microwave distribution within the microwave cavity so that the microwave energy (or, equivalently microwave) is localized at intended regions (hereinafter, referred to as “high-energy regions”) that are stationary within the cavity.

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