Molehole embedded 3-D crossbar architecture used in electrochemical molecular memory device

Abstract

This invention provides a new design and fabrication for a three-dimensional crossbar architecture embedding a sub-micron or nanometer sized hole (called a molehole) in each cross-region. Each molehole is an electrochemical cell consisting of two or more sectional surfaces separated by a non-conductor (e.g., a dialectric layer and solid electrolyte). When used in electrochemical molecular memory device (EMMD), the architecture provides unique features such as a nano-scale electroactive surface, no interaction between memory elements, and easier miniaturization and integration.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application is a Divisional of U.S. Ser. No. 10 / 046,499, filed on Oct. 26, 2001, which is incorporated herein in its entirety for all purposes.STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT [0002] This invention was made with Government support under Grant No: N00014-99-0357 awarded by the Office of Naval Research. The Government of the United States of America may have certain rights in this invention.FIELD OF THE INVENTION [0003] This invention pertains to the fields of microelectronics and molecular electronics. In particular this invention involves the design and fabrication of a novel architecture that can be used for a molecular electrochemical memory device or for a sensor array. BACKGROUND OF THE INVENTION [0004] There has been a great interest in the development of nanoliter to picoliter microvials in analytical chemistry. Arrays of vials containing nanoliter to picoliter volum...

AI Technical Summary

Benefits of technology

This patent describes a new type of electrochemical cell that is very small in size. The cell has a well with a cross-sectional area typically less than 1 μm by 1 μm, and the ratio of the surface area of the first electrode to the second electrode is at least about 2:1. The first electrode is made of copper, silver, chromium, or gold, and the second electrode is made of copper, silver, or aluminum. The electrodes can be made of conducting polymers, conducting nanotubes, or other materials. The cell can have a volume less than 100 femtoliters, and can be used to detect and measure the concentration of molecules in a solution. The cell can be formed on a substrate and can be addressed independently. The technical effects of this invention include the ability to create small, efficient, and highly sensitive electrochemical cells for use in various applications such as sensors and biological assays.

Problems solved by technology

Previous approaches, however, have not provided a convenient method of regulating the relative surface area of the electrodes exposed in the vials, have not been convenient for the fabrication of large precisely arranged arrays of such vials, or have not been feasible for the preparation of sub micron structures.

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