Heterojunction material with magnetoresistance characteristics
A magnetoresistance and heterojunction technology, which is applied in the fields of magnetic field-controlled resistors, magnetic objects, magnetic films, etc. Effect
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Embodiment 1
[0028] Referring to FIG. 1 , a 2-stacked heterojunction material with magnetoresistance properties is fabricated.
[0029] Using laser molecular beam epitaxy equipment, select n-type single crystal Si with a resistivity of 2-6Ω.cm and 2 inches of single-sided polishing as the substrate 1, and adopt conventional laser molecular beam epitaxy technology, at 1×10 -2 Under the oxygen condition of Pa, epitaxial growth of 250nm thick La on Si substrate 1 0.9 Sr 0.1 MnO 3 The thin film is used as the doped manganese oxide layer 2. Then at 1×10 -3 Under the oxygen condition of Pa, in the 250nm thick La 0.9 Sr 0.1 MnO 3 An oxygen-deficient strontium titanate film with a thickness of 100 nm was epitaxially grown on the film 2 as the first auxiliary layer 3, at 1×10 -3 Under the oxygen condition of Pa, the prepared SrTiO 3-δ The δ of the thin film is about 0.4. A 2-stacked heterojunction material with magnetoresistance properties is prepared, in which the doped manganese oxide la...
Embodiment 2
[0031] According to the preparation process of Example 1, use BrTiO 3-δ Instead of SrTiO 3-δ Doping manganese oxide 2, preparing the second auxiliary layer 4 made of doped manganese oxide 2 and oxygen-deficient barium titanate layer, to form a 2-stacked heterojunction material with magnetoresistance characteristics.
Embodiment 3
[0033] According to the preparation process of Example 1, use LaAlO 3-δ Instead of SrTiO 3-δ Make the third auxiliary layer 5, prepare the third auxiliary layer 5 made of the doped manganese oxide layer 2 and the oxygen-deficient lanthanum aluminate, and make a heterojunction material with magnetoresistance characteristics of 2 stacks.
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