Modular structural supporter containing damping filling materials

Abstract

A modularizing structure carriage with damping filling material, which is used in the load-bearing platform carriage of the high precision process equipment and checkout equipment, which is filling the damping material into the tubular support component in order to decrease the weight of every support component and provide the sufficient damping effect, link every support component by the modularizing mode that becomes to the high rigidity platform carriage for support and load. The invention can be used in the high rigidity isolative platform of the overhead floor by the high rigidity structure after combine every support component, is not only decreases the tiny vibration on the horizontal direction effectively but also reduces the weight of the carriage body.

Description

technical field [0001] The present invention provides a high-rigidity and light-weight support frame structure that is filled with damping materials in each support member and constructed in a modular assembly manner, thereby providing a modular lightweight high-frequency platform for the erection environment required by precision instruments and equipment support frame. Background technique [0002] In the electronics and semiconductor industries, most manufacturing and testing equipment are quite sensitive to environmental micro-vibrations. In a wide range, it is often required that neither the vibration transmitted from the environment nor the vibration generated by the equipment itself on the platform can be amplified and cannot be extended, especially in the future technology will gradually move towards nanometer-level resolution, detection Equipment will also have higher requirements for environmental vibration suppression, so the bearing platforms of these processes ...

AI Technical Summary

Problems solved by technology

[0003] In particular, for the bearing platform of precision technology and testing equipment in the clean room workshop, due to the design considerations of the return air system and cleanliness of the workshop, the height difference between the platform and the structural floor of the workshop building is very large (usually more than 1.5M). , so that the bearing platform structure of precision equipment has a large slenderness ratio, resulting in easy amplification of vibration in the horizontal direction, and relatively poor rigidity. The way to improve is to use a larger steel structure skeleton to reduce the slenderness of the supporting structure. length ratio, so that the weight of the supporting structure is greatly increased, which is out of proportion to the improvement of the dynamic characteristics

[0004] For the current technical part of the carrying platform required for precision equipment, such as US Patent No. 5,962,104 and US Patent No. 6,001,451, please refer to figure 1 Shown is the U.S. Patent No. 5,962,104 patent case, although it has introduced a modular design concept, the geometric shapes of the components combined into the platform structure are still too complicated, thereby increasing the manufacturing cost of each component; please refer to figure 2 As shown, the US Patent No. 6,001,451 is a sandwich panel structure, which cannot effectively reduce the weight per unit area of ​​the platform, making the platform structure itself too heavy, so it cannot meet the requirements of lightweight; therefore None of the above platform structures are suitable for the vibration isolation platform required by the raised floor structure (above 1.5M)

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