Fluid jet device and method for controlling jet quality of fluid jet device

A technology of fluid injection and fluid control, which is applied to the device, printing, coating and other directions of coating liquid on the surface, which can solve the problem of insufficient data and so on

Inactive Publication Date: 2006-05-10
BENQ CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This random sampling method can provide a certain reference value for the film thickness of the entire wafer, but for h

Method used

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  • Fluid jet device and method for controlling jet quality of fluid jet device
  • Fluid jet device and method for controlling jet quality of fluid jet device
  • Fluid jet device and method for controlling jet quality of fluid jet device

Examples

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Effect test

no. 1 example

[0058] During the manufacturing process of the fluid ejection device 10A, acid (HF-49%) and alkali (KOH-30%) etchant are used to etch the substrate 100 or the sacrificial layer (not shown) of the wafer, and the structural layer 110 provides protection The role of etching solution.

[0059] To achieve the above purpose, the structure layer 110 is preferably made of low-stress (~100 MPa and tensile stress) silicon nitride deposited by LPCVD process. However, in actual fabrication, it is found that during the etching process, defects such as cracks will occur if the structure layer 110 is too thin (<0.4 um), and the surface circuits will be damaged. As for the completed device, it was also found during testing that the structural layer 110 with different thicknesses (0.6-1.2 um) has a great impact on the driving conditions of fluid ejection (including heating time or driving voltage).

[0060] Figure 2B is a partially enlarged schematic diagram showing a sensor 150 according t...

no. 2 example

[0072] According to the object of the present invention, the present invention further provides a method for controlling the spraying quality of a fluid spraying device. As in the aforementioned microfluid ejection device, the heater is carried on the structural layer, and the heat generated by the heater is transferred to the fluid in the fluid cavity through the structural layer. According to the principle of heat transfer, the same material has the same heat transfer number k, and under the same temperature difference ΔT, the heat flux J is inversely proportional to the transfer distance L, (ie J=-k / L). Therefore, under the same driving conditions of the above-mentioned fluid ejection device, the ejection effect of the fluid ejection device will vary with the thickness of the structural layer, resulting in unstable ejection quality.

[0073] According to known techniques, the turn-on energy required for droplet firing to achieve the same jetting effect, the structural layer...

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Abstract

The invention provides a liquid ejecting device and a method for controlling the ejecting quality. The inventive device comprises a liquid chamber with the first layer to contain the liquid; at least one foam generator arranged on the first layer and opposite to the liquid chamber; a sensor to measure the thickness of first layer; second layer formed on the first layer to cover foam generator and sensor; a ejecting hole near the foam generator and through the second, first layers and liquid chamber. The invention compares the thickness of structural layer measured by sensor with the inside data base via a comparer, to support optimizated liquid ejecting driving conditions and improve the ejecting quality.

Description

technical field [0001] The invention relates to a fluid ejection device technology, in particular to a fluid ejection device system including a sensor and a method for controlling fluid ejection quality. Background technique [0002] Microfluid ejection devices have recently been widely used in the information industry, such as in inkjet printers or the like. With the gradual development of micro system engineering, this kind of fluid injection device has gradually been applied in many other fields, such as fuel injection system (fuel injection system), cell sorting (cell sorting), drug delivery system (drug delivery system) ), printing lithography (print lithography) and micro jet propulsion system (micro jet propulsion system), etc. In the aforementioned application fields, a more successful design is to use thermal driven bubbles to eject liquid droplets. It is also the most commonly used due to its simple design and low cost. [0003] figure 1 The monolithic fluid ej...

Claims

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Application Information

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IPC IPC(8): B41J2/01B05C5/00
Inventor 周忠诚黄宗伟
Owner BENQ CORP
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