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Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron

A technology for production equipment and magnetrons, applied in mechanical equipment, valve details, valve devices, etc., can solve the problems of oil having a great influence on high vacuum, vacuum degree not meeting the requirements, affecting product quality, etc., and shortening exhaust gas. time, improve the vacuum degree, and ensure the effect of product quality

Active Publication Date: 2006-04-19
GUANGDONG WITOL VACUUM ELECTRONICS MFR
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AI Technical Summary

Problems solved by technology

Once the bellows of the V3 valve is broken, the nitrogen diffuses into the air, the nitrogen added to the vacuum tank decreases, and the entire vacuum system cannot be filled within the specified time, and the gas in the air will be forced into the vacuum system. The composition of the air varies depending on the environment. Very large, the air is full of grease, sulfur and carbon dioxide, which will eventually become acidic substances and corrode the baffle of the cryopump; oil has a great impact on high vacuum, if there is grease on the metal surface of the vacuum system, the grease will continue to Decompose outwards from the ground, the vacuum degree can not meet the requirements, which seriously affects the product quality

Method used

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  • Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron

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Embodiment

[0017] The method for repairing the nitrogen filling valve in the magnetron production equipment of the present invention comprises the following steps:

[0018] 1) Cut the damaged bellows in the valve along the vertical direction of the pipe diameter;

[0019] 2) Grind both sides of the corrugated sheet;

[0020] 3) Use high-vacuum glue to bond the corrugated sheets on both sides, and use a clamp to compress the two sides of the corrugated sheet, so that the high-vacuum glue can fully fill the gap between the corrugated sheets;

[0021] 4) Place it to dry at room temperature to make it bond firmly;

[0022] 5) Grinding and trimming the excess vacuum glue to ensure that the vacuum glue is flat and the bellows can be stretched freely;

[0023] 6) Install the repaired valve on a leak detector to detect leaks so that it meets the technical requirements of the valve.

[0024] The above step 4) is placed at room temperature for 60 to 120 minutes to dry to make it bonded firmly. ...

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Abstract

A method for repairing nitrogen charging valve used on equipment for producing magnetron includes shearing damaged bellows in valve along vertical direction of its diameter , grinding two edges of corrugated sheet , applying high vacuum glue to bind two edges of said corrugated sheet and to let said glue fill full of seam of corrugated sheet , placing it in room temperature and drying it by air to let it be bound firmly , grinding it for ensuring evenness of vacuum glue to let it stretch out and draw back freely , setting repaired valve on leakage tester for checking whether repaired valve is on specification or not .

Description

1. Technical field: [0001] The invention relates to a method for repairing a nitrogen-filling valve in magnetron production equipment, which belongs to the innovative technology for repairing a nitrogen-filling valve. 2. Background technology: [0002] In the production equipment of the magnetron, once the parts of the black ball exhaust table are damaged, they must be replaced. However, all high-vacuum components are imported, and the cost of spare parts is very expensive. Among them, the cost of spare parts for four high-vacuum valves is the highest, and the nitrogen filling valve (V3) among the four high-vacuum valves is the most easily damaged, and the frequency of replacement is the highest. . The main reason for the replacement is that the bellows of the V3 valve is broken, causing nitrogen (N2) leakage, which will greatly prolong the vacuuming time and increase the loss of nitrogen; the amount of nitrogen used is a hundred times or even hundreds of times the normal a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K41/10
Inventor 刘兆震叶亚富邓小林
Owner GUANGDONG WITOL VACUUM ELECTRONICS MFR
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