Gas heating method and gas heating device

Abstract

Made available are a gas-heating method and a small-scale, energy-saving gas-heating device that, utilizing heaters that enable high-speed gas heat-up without being corroded by the gas, make possible the direct, efficient heating of gases. A plurality of platelike ceramic heaters 30 , or heater units in which a number of ceramic heaters are combined, is arranged in a staggered-ledge formation within a flow path or heating chamber for gases to create a zigzag gas flow-path A; gas supplied to the gas flow-path A is heated directly by the ceramic heaters 30 or heater units. This gas-heating device 10 can be utilized, in apparatuses that process NOx:containing exhaust gases or noxious / poisonous exhaust gases, for heating the exhaust gases and their diluent gases.

Description

technical field [0001] The present invention relates to methods of heating gases and gas heating equipment for use in various chemical reactors—for example, gas heating equipment for devices that contain NO and are exhausted from semiconductor devices and liquid crystal manufacturing processes. X or NH 3 Devices for the treatment of exhaust gases, devices for the treatment of harmful or toxic exhaust gases from sterilization and disinfection processes in hospitals, and other such devices. Background technique [0002] The semiconductor device manufacturing process includes a wafer processing stage in which semiconductor wafers are processed to produce integrated circuits. Various processes such as thin film deposition operations, oxidation operations, doping operations, and etching operations are performed in the wafer processing stage to form, for example, dielectric films, electrode wirings, and semiconductor films on the wafer front side. [0003] In carrying out variou...

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Problems solved by technology

[0014] However, the above-mentioned conventional exhaust gas treatment equipment has such a disadvantage that the heater for heating the exhaust gas either indirectly heats the gas without contacting the gas, or even if the heater contacts the gas, since a general resistance heating element is used as the heater, the They are easily corroded by gases; and, in addition, the heating time is prolonged due to the ineffective heating of the flowing gas, thereby causing considerable power loss

Another problem is that in order to heat a specified amount of gas, the heating chamber must be made very large, which means making the equipment too large

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