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Hybrid integrated tunable semiconductor laser

A hybrid integration and laser technology, which is applied in the direction of semiconductor lasers, lasers, laser components, etc., can solve the problems of increasing the difficulty of device manufacturing and slow tuning speed

Inactive Publication Date: 2005-08-24
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem with fiber grating-tuned lasers is that it is mechanically tuned, and the tuning speed is relatively slow
In addition, the size difference between the fiber grating and the laser waveguide is too large, and the coupling problem between the two is also a key point, which greatly increases the difficulty of device fabrication

Method used

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Embodiment Construction

[0021] See Figure 1 and figure 2 , Figure 1 and figure 2 They are schematic diagrams and perspective views of the thermo-optic tunable laser according to the first embodiment of the invention, and the substrate 1 includes N - Silicon light guide layer, silicon dioxide (SiO 2 ) insulating layer and silicon substrate.

[0022] The positioning groove 2 is etched on the substrate 1, preferably the positioning groove 2 is etched to the middle buried layer SiO 2 Next, this allows the use of low silicon substrates as heat sinks for lasers. A ridge waveguide 3 is carved on a substrate 1 and a grating 4 is formed on the waveguide 3 . In order to facilitate the connection with the optical fiber, a V-shaped groove 10 is formed at the end of the waveguide 3 . For the description of the structure of the external cavity laser, refer to the patent WO00 / 03461. For the details of the docking installation of the laser chip 7 and the waveguide 2, refer to the patent WO97 / 43676 cited in WO0...

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Abstract

This invention is a compound tunable semiconductor laser, including a substrate with locating groove etched on it; a laser in the location groove; a spinal wave-guide etched on the substrate, and there is circle rectangle groove on the spinal wave-guide; a Prague grating forms through the cycle rectangle groove on the spinal wave-guide, the Prague grating and the laser use automatic collimation method to couple each other; an electrode forms on the Prague grating, this electrode is a heating electrode and utilizes heat luminous effect to change the reflecting wave length of the Prague grating; a thermistor with minus temperature coefficient on the substrate; a V-shaped groove is on one end of the substrate to fix the fiber.

Description

technical field [0001] The invention relates to a tunable laser, in particular to a narrow line width tunable light source-hybrid integrated tunable semiconductor laser used in the optical communication field. Background technique [0002] There are currently several technologies for realizing tunable semiconductor lasers. The main method is to change the wavelength of the frequency-selective components in the laser to realize the wavelength tuning function. It mainly includes monolithic integrated multi-electrode lasers, such as tunable DBR lasers, sampling grating lasers, superstructure grating lasers, etc., making gratings of various structures at one end of the semiconductor active dielectric waveguide, and heating in the grating area. The most important thing is that the method of current injection changes the effective refractive index of the grating region, thus changing the wavelength of the feedback oscillation. The other type is the external cavity laser, such as ...

Claims

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Application Information

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IPC IPC(8): H01S5/00H01S5/026
Inventor 徐庆扬陈少武
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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