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Electrode piece for electrostatic chuck, electrostatic chuck device and its adsorptiong method

An electrostatic chuck and electrode sheet technology, applied in the field of electrode sheets, can solve the problems of increased leakage current between electrodes, foreign matter in the binder, and reduced insulation resistance value, etc., and achieves strong adsorption force, high utilization value, and durability. high effect

Active Publication Date: 2005-02-16
TOMOEGAWA PAPER CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem that failure due to insulation breakdown occurs in a short period of time due to poor electrode patterning, foreign matter in the adhesive, etc., and foreign matter and air bubbles mixed in during the filling of the adhesive.
[0007] In addition, there is a problem that when using an electrostatic chuck device using heating, the insulation resistance value of the adhesive, etc. decreases significantly, and the leakage current between electrodes increases, or even if there is no abnormality at the initial stage, when using copper or silver When the first metal is used as the electrode material, due to electromigration, the electrode material is gradually dissolved into the interior of the binder layer, etc., and finally insulation breakdown occurs
However, the reality is that, because of the problems described, the design of the graphics is limited

Method used

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  • Electrode piece for electrostatic chuck, electrostatic chuck device and its adsorptiong method
  • Electrode piece for electrostatic chuck, electrostatic chuck device and its adsorptiong method
  • Electrode piece for electrostatic chuck, electrostatic chuck device and its adsorptiong method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Embodiment 1 (making of electrostatic chuck device)

[0043] Copper foil with a thickness of 12 μm (manufactured by Mitsui Metal Mining Co., Ltd., trade name: TQ) is laminated on both sides of a polyimide film (manufactured by Toray Dupont Co., Ltd., trade name: Capton 200H, thickness 50 μm) through a 20 μm thick adhesive film. -VLP). Next, by etching, the first electrode layer ( Figure 4 The shape shown), the first electrode layer is composed of a comb-shaped electrode with a width of 5 mm and a width of 5 mm insulated parts alternately arranged, with an area of ​​90 × 90 mm; The second electrode layer ( Figure 5 After that, on the two electrode layers, a polyimide film (Capton 200H) was laminated through a 20 μm adhesive film to obtain an electrode sheet.

[0044] After cutting the electrode sheet to a predetermined size, the second electrode layer side was bonded to a 5×100×100 mm aluminum base using a 20 μm thick adhesive film to produce an electrostatic chuck ...

Embodiment 2

[0049] An electrostatic chuck device was produced with the same materials and operating conditions as in Example 1, except that the comb-shaped design of the first electrode layer was changed to a width of 2 mm for the conductive part and 2 mm for the width of the insulating part.

Embodiment 3

[0051] An electrostatic chuck device was produced with the same materials and operating conditions as in Example 1, except that the comb-shaped design of the first electrode layer was changed to a width of 10 mm for the conductive part and 10 mm for the width of the insulating part.

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PUM

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Abstract

Provided is an electrostatic chuck device which is high in holding force of an insulating material and durability to the dielectric breakdown, an electrodeposition sheet for it, and a method for using the electrostatic chuck device. In the electrostatic chuck device, an electrode sheet 10 is composed of an insulating layer 1 made of an insulating material, first / second electrode layers 2, 3 provided on both faces of the insulating layer for generating the potential difference via the insulating layer, and insulating thin films 4, 5 for covering the surfaces of the two electrode layers. The electrode sheet 10 is pasted on a base 7 so that the second electrode layer is located at the base side. The first electrode of the electrostatic chuck device is grounded. A voltage is applied to the second electrode. A body to be adsorbed is adsorbed on the insulating thin film 4.

Description

technical field [0001] The present invention relates to an electrode sheet for an electrostatic chuck device, and an electrostatic chuck device using the electrode sheet. Background technique [0002] The electrostatic chuck device is an indispensable device in the IC production process because it exerts an adsorption function in a vacuum and is easy to operate. In particular, an electrode sheet for an electrostatic chuck device made of a plastic film and a copper foil can be manufactured at low cost, and therefore an electrostatic chuck device using an electrode sheet for an electrostatic chuck device is widespread. [0003] The electrostatic chuck device used in the IC production process is generally unipolar. In this electrostatic chuck device, by using a semiconductor chip as an electrode and applying a voltage through a dielectric, it is found that there is a high adsorption force. [0004] In recent years, attempts have been made to use electrostatic chuck devices for...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68B23Q3/15H02N13/00H01L21/683
CPCH01L21/6833H01L21/68757H02N13/00
Inventor 栃平顺岛武志长谷川雄一川濑律
Owner TOMOEGAWA PAPER CO LTD
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