Field transmission magnetosensitive sensor

Abstract

A magnto transducer consists of bottom base, the first metal film, the first insulation film, the second metal film, the second insulation film, the third metal film, isolator, top base, positive electrode and insulation film as well as film located at centre of the first metal film and used as electron source of field emission. The film can be made by carbon nanotube film or by diamond film.

Description

Technical field: [0001] The invention belongs to the field of electronic technology, and in particular relates to a magnetic sensitive sensor. Background technique: [0002] The traditional sensors that use the Hall effect to detect the magnetic field strength usually first grow compound semiconductor thin films, then form components through photolithography, steam tube and other precision processing, and finally package them in plastic. The principle is to use the electrons in the semiconductor to deflect under the magnetic field to obtain the magnetic field strength to be measured. Since electrons move in semiconductors, compared with electrons moving in vacuum, their movement speed and sensitivity are greatly limited, and their working environment will also be limited by high temperature and nuclear radiation. [0003] The paper "Fieldmission magnetic sensors based on focusing devices" (Solid-State Electronics 45 (2001) 977-986) published by M.I.Marques and P.A.Serena on...

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Problems solved by technology

However, because the emission tip is very thin, the vacuum degree is very high during the working process, otherwise the top of the emitter is easily damaged due to the rebound of the particles, and the actual field emission comes from a small area on the top of the emitter, where the emission The current density is very high. At the same time, due to the unsatisfactory thermal conductivity of molybdenum and silicon, the temperature at this place will be high during emission, resulting in short life, and the manufacturing process is more complicated and the cost is relatively high.

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