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Excimers lamp

An excimer lamp, inner tube technology, applied in discharge lamps, discharge tubes, electrical components, etc., can solve the problems of uneven brightness, decreased brightness, increased bulb intensity, etc., to suppress generation and expansion, and prolong life. Effect

Inactive Publication Date: 2004-06-23
ORC MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In addition, by mixing or coating substances other than the discharge gas in the discharge space, the following disadvantages will occur, for example, the generation of impure gas due to the coating material, the decrease in brightness due to pollution of the discharge gas, etc., the brightness Unevenness, lamp breakage due to different thermal expansion coefficients, etc.
Also, due to the formation of wrinkles, the strength of the bulb decreases or the factor of deformation increases

Method used

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Examples

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Effect test

no. 1 example

[0024] The first embodiment of the present invention is an excimer lamp in which a light-shielding portion for absorbing or scattering ultraviolet rays is provided on the tube body of the inner tube and the outer tube between the effective light-emitting portion and the joint portion.

[0025] figure 1 is a cross-sectional view of the excimer lamp according to the first embodiment of the present invention. figure 1 (a) is an excimer lamp of a type with a long inner tube. figure 1 (b) is an excimer lamp of the type in which the inner tube and the outer tube have equal lengths. exist figure 1 In, the inner tube 1 is the inner quartz glass tube. The outer tube 2 is the outer quartz glass tube. The joint part 3 is a part for joining the inner tube and the outer tube. The space formed by the inner tube and the outer tube is the discharge space. Discharge gas is sealed in the discharge space. The light shielding portion 4 is glass for shielding or scattering ultraviolet r...

no. 2 example

[0031] A second embodiment of the present invention is an excimer lamp in which a hardening agent is coated at the junction of an inner tube and an outer tube.

[0032] Figure 4 is a cross-sectional view of an excimer lamp according to a second embodiment of the present invention. Figure 4 (a) is an excimer lamp of a type with a long inner tube. Figure 4 (b) is an excimer lamp of the type in which the inner tube and the outer tube have equal lengths. exist Figure 4 In, the inner tube 1 is the inner glass tube. The outer tube 2 is the outer glass tube. The joint part 3 is a part for joining the inner tube and the outer tube. The curing agent 5 is a curing agent such as an adhesive.

[0033] Now, the function of the excimer lamp according to the second embodiment of the present invention constituted as above will be described. like Figure 4 As shown, a curing agent 5 such as an adhesive material is applied to the outer surface of the double-tube bulb other than the ...

no. 3 example

[0037]The third embodiment of the present invention is that a light-shielding part for absorbing or dispersing ultraviolet rays is provided between the outer tube and the inner tube between the effective light-emitting part and the joint part, and a hardening agent is coated on the joint part. Excimer lamps.

[0038] Figure 5 is a cross-sectional view of an excimer lamp according to a third embodiment of the present invention. Figure 5 (a) is an excimer lamp of a type with a long inner tube. Figure 5 (b) is an excimer lamp of the type in which the inner tube and the outer tube have equal lengths. exist Figure 5 In, the inner tube 1 is the inner glass tube. The outer tube 2 is the outer glass tube. The joint part 3 is a part for joining the inner tube and the outer tube. The light shielding portion 4 is glass for shielding ultraviolet rays. The curing agent 5 is a curing agent such as an adhesive.

[0039] Now, the function of the excimer lamp according to the third...

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Abstract

The present invention is one kind of excited quasi-molecular lamp with double-layered lamp bulb joint not to become fragile in ultraviolet ray. In the excited quasi-molecular lamp, in the inner tube and the outer tube between the effective light emitting part and the joint part, there is shading part to block ultraviolet ray and made of opaque quartz glass or Vicol heat resisting high-boron silicate glass with dispersed ultraviolet ray absorbing or scattering material. The present invention can suppress the concentration of ultraviolet ray to the joint part caused by fiber effect and prevent the production of micro crack in the joint. In addition, painting adhesive material and other hardening agent to the surface part except effective light emitting part of the double-layered lamp bulb can raise mechanical strength and suppress the expansion of micro crack.

Description

technical field [0001] The present invention relates to an excimer lamp, and more particularly to an excimer lamp for preventing deterioration of a junction between an inner tube and an outer tube due to ultraviolet rays. Background technique [0002] The excimer lamp is a dielectric barrier discharge lamp that forms excimers by discharging through a dielectric barrier and utilizes light emitted from the excimers. Ultraviolet rays emitted from excimer lamps can be used as an ultraviolet light source for photochemical reactions. [0003] like Image 6 As shown, the excimer lamp adopts a double-tube structure in which the inner tube 1 and the outer tube 2 are arranged coaxially. An electrode is provided on the inner surface of the inner tube 1 and another electrode is provided on the outer surface of the outer tube 2 . The discharge space 6 formed between the inner tube 1 and the outer tube 2 is filled with a rare gas for discharge. By applying a high-frequency voltage betw...

Claims

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Application Information

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IPC IPC(8): H01J5/02H01J5/08H01J5/16
Inventor 见代修一石桥纪雄藤森昭芳
Owner ORC MFG
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