Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method

An organic polymer, inorganic nanotechnology, applied in electrical components, electrical solid devices, circuits, etc., can solve problems such as unsatisfactory stability and reliability, poor resistance to high humidity environments, and hindering the practical application of humidity sensors. Achieve the effect of improving resistance to high humidity environment, good component consistency, and high yield

Inactive Publication Date: 2003-12-03
上海华实纳米材料有限公司
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  • Abstract
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  • Application Information

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Problems solved by technology

However, both inorganic and organic polymer humidity-sensitive materials have shortcomings such as poor resistance to high-humidity environments, unsatisfactory stability and reliability, which greatly hinder the practical application of humidity sensors.

Method used

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  • Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method
  • Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method
  • Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method

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preparation example Construction

[0018] The preparation method of the humidity sensitive film is to use a dipping machine to immerse the glass-ceramic interdigitated gold electrode in the moisture-sensitive liquid for 1-3 minutes, pull it out, dry it at room temperature for 20-60 minutes, and heat it at 80-140°C 0.5 to 4 hours, then placed in an acidic aqueous solution with a pH of 1 to 6 for 2 to 60 minutes, then dried the element, and heated at 80 to 120° C. for 1 to 4 hours.

[0019] The moisture-sensitive liquid is (1) a silicon-containing polyelectrolyte having a structure (I), wherein X- is a halide ion, and the letter y is a number of 1-8;

[0020] (2) Nano ZnO colloid, wherein the size of inorganic nanoparticles is less than 50 nanometers. The two are configured at a weight ratio of 1:0.05-0.6 to form an ethanol solution with a weight percent concentration of 0.5%-5%.

Embodiment

[0022] 1) Electrode cleaning

[0023] Soak the glass-ceramic interdigitated gold electrode in absolute ethanol and acetone, ultrasonically clean it, and dry it for later use;

[0024] 2) Dip coating of humidity sensitive film and post-treatment

[0025] Use a dipping machine to immerse the ceramic interdigitated gold electrode in the moisture-sensitive solution for 1 to 3 minutes, then pull it out, dry it naturally at room temperature for 20 to 60 minutes, heat treat it at 80 to 140°C for 0.5 to 4 hours, and then place it at PH = 1 to 6 in acidic aqueous solution for 2 to 60 minutes, then dry the element and heat at 80 to 120°C for 1 to 4 hours.

[0026] The moisture-sensitive liquid is (1) a silicon-containing polyelectrolyte with a (II) structure;

[0027] (2) Nano ZnO colloid, wherein the size of inorganic nanoparticles is less than 50 nanometers. The two are configured at a weight ratio of 1:0.05-0.6 to form an ethanol solution with a weight percent concentration of 0...

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Abstract

An organic high-molecule / inorganic nano composite resistance type moisture-sensitive film element is prepared through providing microcrystal glass as substrate, arranging multiple pairs of interdigital gold electrodes on it, immersing it in moisture-sensing liquid to become film, heat treating and cross-linking. Its advantages are low cost, high water-proofing nature, response linearity and sensivity, and high response speed.

Description

technical field [0001] The invention relates to an organic macromolecule-inorganic nanocomposite resistive thin film humidity sensitive element and a manufacturing method thereof. Background technique [0002] Humidity sensors are an important class of chemical sensors, which are widely used in storage, industrial production, process control, environmental monitoring, household appliances, meteorology, etc., such as grain anti-mildew, high-altitude weather detection, greenhouse planting, etc. attention and research. Humidity-sensitive materials currently used mainly include inorganic oxide ceramics and organic polymers, and the development of organic polymer resistive humidity-sensitive materials is relatively rapid. However, both inorganic and organic polymer humidity-sensitive materials have shortcomings such as poor resistance to high-humidity environments, unsatisfactory stability and reliability, which greatly hinder the practical application of...

Claims

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Application Information

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IPC IPC(8): G01N27/02H01L49/00
Inventor 李扬佘勇黄德欢杨慕杰
Owner 上海华实纳米材料有限公司
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