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Zinc-aluminium vacuum evaporation coating machine

A technology of vacuum evaporation and coating machine, which is used in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions

Inactive Publication Date: 2003-11-12
上海奥移电器有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The beneficial effects of the present invention are: the second vacuuming system in the composed vacuum chamber replaces the condensation trapping pump, overcomes the defects of high manufacturing cost and operating cost in the prior art, realizes the localization of equipment and fills up the domestic gap, making the Zinc-aluminum coating products have reached the advanced level

Method used

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  • Zinc-aluminium vacuum evaporation coating machine
  • Zinc-aluminium vacuum evaporation coating machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0008] See accompanying drawing 1, the complete machine that implements computer control is seated on the chassis 1, is provided with track on the chassis 1, can be seated on the freezer 3 on the main frame 2 by the roller of the main frame 2, and the freezer 3. The film transfer frame box 5-1 connected in parallel and the film transfer frame box 5-1 are provided with the main shaft 4, the film transfer frame 5, and the shielding bracket 21 to move along the track. The vacuum chamber 6 includes the grid plate 20 and communicates with each other. The two parts of the winding chamber 16 and the coating chamber 19 are fixed on the chassis 1. The opening of the winding chamber 16 of the vacuum chamber 6 faces the main shaft 4 and the film transfer frame 5, and the opening of the coating chamber 19 faces the evaporation source 17. Zinc and aluminum crucibles 17-1 and 17-2 are arranged successively on the source 17, and the evaporation boat 17 is fixed on the side wall of the heating...

Embodiment 2

[0012] See accompanying drawing 1, the second vacuum system is a booster pump 12, is communicated with the coiling chamber 16 of vacuum chamber 6 by pipeline, valve 10-1, and the other end is connected Roots pump 14, slide valve pump 15 by pipeline, slide valve The other end of valve pump 15 communicates with atmosphere, and all the other are identical with embodiment 1, do not repeat narration again;

Embodiment 3

[0014] See accompanying drawing 1, the zinc pot 17-1 that carries on the evaporating boat 17 does not work, according to the aluminum pot 17-2 temperature is constant at 1500 ℃ ± 10, aluminum is plated on the plastic film, all the other are the same as embodiment 1, no longer make Repeat the narrative.

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PUM

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Abstract

The zinc-aluminium vacuum evaporation coating machine comprises vacuum chamber formed from coiling chamber, film-coating chamber and network plate, first vacuum-pumping system formed from diffusion pump, Roots pump, slide valve pump and valve, cold trap type second vacuum-pumping system and evaporation source. Said second vacuum-pumping system adopts non-condensaing trapping pump which is formed from slide valve pump, Roots pump, one booster pump or two booster pumps and valve which are successively series-connected, or two booster pumps are mutually parallel-connected, then series-connected with said other elements. Said second vacuum-pumping system is substituted for cold trap, so that it can simplify technological process, reduce cost and raise working efficiency.

Description

1. Technical field: [0001] The invention relates to a vacuum coating machine, and in particular discloses a vacuum evaporation coating machine for galvanized aluminum with non-conductive medium film, which is applied to the coating of electronic components and packaging materials. 2. Background technology: [0002] At present, the vacuum coating machines in the domestic market basically use vacuum evaporation, sputtering, ion and other methods for vacuum coating. Generally, they can only coat aluminum on plastic films. There are almost no vacuum coating equipment for zinc and aluminum coating, and zinc and aluminum vacuum coating. There are few domestic equipments, and the zinc-aluminum vacuum coating machine imported from abroad is expensive. The condensate trap pump commonly known as the cold trap type is used as the second set of vacuum system. Due to the complex process, high manufacturing cost and poor use effect of the structure, the system is formed Running costs are ...

Claims

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Application Information

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IPC IPC(8): C23C14/14C23C14/20C23C14/24C23C14/56
Inventor 唐玉宇奚顺明
Owner 上海奥移电器有限公司
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