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Apparatus for growing crystal by repeating adding material and method thereof

A technology for growing crystals and feeding tubes, which is applied in the directions of polycrystalline material growth, crystal growth, single crystal growth, etc., and can solve problems such as the application of limited and repeated feeding

Inactive Publication Date: 2007-07-18
袁建中
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the prior art has greatly limited the application of repeated feeding

Method used

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  • Apparatus for growing crystal by repeating adding material and method thereof
  • Apparatus for growing crystal by repeating adding material and method thereof
  • Apparatus for growing crystal by repeating adding material and method thereof

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Embodiment Construction

[0032] The device and method of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0033] Fig. 1 shows that in the prior art, the molten material crucible 12 is placed in the graphite crucible 11 in the graphite heater 10. A whole rod-shaped growth material 101 is used to repeatedly feed into the melting material crucible 12 . Part of the growth raw material has been melted in the melting material crucible 12 to form a melt 13 . Below the graphite crucible 11, there are heater connection lines 14 between the graphite heaters 10.

[0034] FIG. 2 shows that in the prior art, a feeder 201 is used to repeatedly feed granular or small block growth raw materials 202 into the melting crucible 12 . Wherein the granular growth material 202 is a particle with a diameter of several millimeters.

[0035] FIG. 3 shows that all the growth raw materials in the melting material crucible 12 are melted into a melt, ...

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Abstract

An apparatus and method for recharge raw material in the crystal growth. Use a feed tube to recharge raw material in a crucible. Cover the lower end of the tube with a plate. The plate is made of the same raw material as the charge in the crucible. Load the raw material in the tube, and then lower the tube into the melt in crucible. When the plate is melted, the raw material in the tube is droped into the crucible. It can be recharged using the feed tube after pulling a ingot, sequentially multiple ingots can be grown by using one crucible. In this apparatus and methods, there are not limited for the shape and size of the raw material, and increase the quantity of the raw material with one time. This apparatus and method can improve productivity, product quality and yield. Lowering material consumption, energy and cost.

Description

technical field [0001] The invention relates to a device and method for growing crystals, in particular to a device and method for growing crystals with repeated feeding. Background technique [0002] 1. Method of growing crystals [0003] The most common method for growing crystals is the Czochralski method. For example, more than 95% of monocrystalline silicon in the world is produced by Czochralski method (CZ method). In the Czochralski method, growth raw materials are added to a molten material crucible, and the growth raw materials are melted by resistance heating in a single crystal furnace, and a whole crystal rod is grown through a seed crystal. [0004] 2. The current method of repeated feeding [0005] In the Czochralski method, due to the use of a molten material crucible, and due to the structure of the Czochralski single crystal furnace, most of them can only pull one crystal rod at a time. Only a few companies have adopted the repeated feeding technology. ...

Claims

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Application Information

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IPC IPC(8): C30B15/00C30B29/06C30B15/02
CPCC30B29/06C30B15/02
Inventor 袁建中
Owner 袁建中
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