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Flow stabilizing controller

A control device and flow stabilization technology, applied in the direction of flow control, flow control using electric devices, flow control without auxiliary power, etc. It can solve the problems of inaccurate control and poor microscopic stability, and achieve the effect of reducing flow fluctuations.

Inactive Publication Date: 2005-09-28
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0003] However, it is not accurate enough to control the flow of gas only by using the electromagnetic regulating valve as the actuator. The pressure fluctuation of the gas source has an impact on the stability of the flow. The flow fluctuates up and down near the set value, and the microscopic stability is poor, so it is not suitable for occasions that require high gas flow stability

Method used

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Embodiment Construction

[0022] Such as figure 1 As shown, the present invention includes an air source input passage 13, an electromagnetic regulating valve 14, an output passage 4, and it also includes a secondary regulating valve 8 connected with the electromagnetic regulating valve 14, figure 2 It is an enlarged view of the secondary regulating valve 8. The secondary regulating valve 8 includes a valve chamber 3, a valve port 6 communicating with the valve chamber 3, a diaphragm 10 fixed on the wall of the valve chamber 3, a gasket 9 connected to the diaphragm 10, a spring 7, and the diaphragm 10 One side has a pressure chamber 11 communicating with the air source input channel 13, and the other side has a valve chamber 3 communicating with the output chamber 1 of the electromagnetic regulating valve. The valve chamber 3 is equipped with a gasket 9 and a spring 7, and one end of the spring 7 Against the gasket 9, the other end is fixed with the valve seat 5.

[0023] The air source enters from ...

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Abstract

The flow stabilizing controller is one electromechanical device for stabilizing gas flow rate. Into a common electromagnetic regulating valve, one secondary regulating valve includes increased comprising valve cavity, pressure cavity, membrane, sealing pad, spring and valve port. The pressure difference across the membrane is used to drive the sealing pad to shift so as to control the opening of the valve and stabilize the gas flow rate the valve port outputs. Mass flow rate control device with the said flow stabilizing controller can provide stable flow rate in micro interface, and is suitable for use in gas chromatograph, microelectronic processing apparatus and other fields needing relatively high micro flow rate stability.

Description

technical field [0001] The invention relates to a steady flow control device, in particular to an instrument for precise steady flow control of gas flow. Background technique [0002] Many of the existing gas mass flow control devices use electromagnetic regulating valves as actuators, cooperate with flow detection sensors, and make the gas flow constant at the set value through closed-loop control, as disclosed in Chinese patent specification CN2243092 The principle of such an electromagnetic regulating valve used in a gas flow controller is: the voltage signal from the measuring circuit is compared with the set value, and the difference is sent to the electromagnetic regulating valve through the adjustment of the integral regulating circuit of the control circuit. Control the signal until the electromagnetic regulating valve makes the gas flow equal to the set value. [0003] However, it is not accurate enough to control the flow of gas only by using the electromagnetic r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D7/00G05D7/01G05D7/06
Inventor 张卫龚光祥左祥顺
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD
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