Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Liquid level pipe joint and wafer cleaning equipment capable of obtaining accurate liquid level information in absence of liquid

A technology for cleaning equipment and liquid level tubes, which is applied in the direction of pipes/pipe joints/fittings, mechanical equipment, liquid/fluid solid measurement, etc., and can solve the problem of liquid level sensor 4 outputting wrong liquid level information and liquid level tube 2 liquid not being timely Discharge, cleaning fluid can not completely discharge light and other problems, to achieve the effect of reducing the surface tension of the liquid

Pending Publication Date: 2022-07-05
WUXI ASIA ELECTRONICS INTELLIGENT EQUIP CO LTD
View PDF15 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, when the cleaning liquid is a high-viscosity cleaning liquid such as sulfuric acid, when the cleaning liquid is discharged in the tank, due to the relationship between the surface tension of the cleaning liquid, the cleaning liquid will remain at the interface between the liquid level pipe 2 and the bottom of the tank body 1, resulting in The cleaning liquid cannot be completely discharged, which further causes the liquid in the liquid level tube 2 to not be discharged in time, so that the liquid level sensor 4 outputs wrong liquid level information

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Liquid level pipe joint and wafer cleaning equipment capable of obtaining accurate liquid level information in absence of liquid
  • Liquid level pipe joint and wafer cleaning equipment capable of obtaining accurate liquid level information in absence of liquid
  • Liquid level pipe joint and wafer cleaning equipment capable of obtaining accurate liquid level information in absence of liquid

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] This embodiment provides a liquid level pipe joint, such as figure 2 As shown, the liquid level pipe joint is arranged at the bottom of the tank body 1 to connect the liquid level pipe 2 with the bottom of the tank body 1. The liquid level pipe joint 3 has a channel in the middle, including the upper end extending into the bottom of the tank body 1. part 31, the lower end part 33 connected with the liquid level pipe 2, the flange 32 between the upper end part 31 and the lower end part 33, the top surface of the upper end part 31 has an inclined surface, so that the plane where the opening of the upper end part 31 is located is the same as the horizontal plane An included angle is formed (that is, an acute angle is formed, preferably 30°-60°), and the lowest point of the opening of the upper end 31 ( figure 2 A point in ) is not higher than the inner wall of the bottom of the tank body 1.

[0038] In the liquid level pipe joint of this embodiment, the structure of the...

Embodiment 2

[0044] This embodiment provides a wafer cleaning device with accurate liquid level information when there is no liquid, including:

[0045] tank 1;

[0046] The liquid level pipe 2 is vertically arranged on the outer wall of the tank body 1, the bottom of the liquid level pipe 2 is communicated with the bottom of the tank body 1, and the top of the liquid level pipe 2 is communicated with the top of the tank body 1 or is an opening;

[0047] The liquid level sensor 4 is arranged on the liquid level pipe 2 and is used for sensing the liquid level height in the liquid level pipe 2;

[0048] The liquid level pipe joint 3 is the liquid level pipe joint described in Embodiment 1.

[0049] Further, a plurality of the liquid level sensors 4 are arranged along the height direction of the liquid level pipe 2 .

[0050] The liquid level pipes 2 are arranged in parallel, so as to facilitate the installation of multiple liquid level sensors 4 in a limited space.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a liquid level pipe joint and wafer cleaning equipment capable of obtaining accurate liquid level information when no liquid exists, the structure of the liquid level pipe joint enables an opening of a tank body and an opening of a liquid level pipe to be an inclined plane, and the lowest point of the opening in the upper end portion is not higher than the inner wall of the bottom of the tank body so that all liquid can flow away from the tank body. And meanwhile, the inclined upward upper end part is used for puncturing the integrity of the liquid surface, so that the surface tension of the liquid is reduced, and the liquid can be discharged as much as possible.

Description

technical field [0001] The application belongs to the technical field of wafer cleaning equipment, and in particular relates to a liquid level pipe joint and wafer cleaning equipment with accurate liquid level information when there is no liquid. Background technique [0002] Wafer cleaning equipment such as figure 1 As shown, it includes a tank body 1 for accommodating wafers and cleaning liquid. The cleaning of the wafers is completed in the tank body 1. In order to facilitate the monitoring of the liquid level in the tank body 1, a vertical liquid level needs to be set outside the tank body 1. Pipe 2, the bottom of the liquid level pipe 2 is connected with the bottom of the tank body 1, the top of the liquid level pipe 2 is connected with the top of the tank body 1, the page height of the liquid level pipe 2 is consistent with the liquid level height in the tank body 1, and the liquid level is used. The height of the liquid level in the tank body 1 can be obtained by sen...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B08B13/00F16L41/08G01F23/02H01L21/67
CPCB08B13/00F16L41/08G01F23/02H01L21/67057Y02P70/50
Inventor 钱诚李刚霍召军
Owner WUXI ASIA ELECTRONICS INTELLIGENT EQUIP CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com