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Vacuum-pumping control system and control method for roll-to-roll coating machine

A control system and vacuum pumping technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of vacuum pump requirements and high pressure, reduce requirements and pressure, reduce energy consumption, improve Effect of Coating Quality and Efficiency

Pending Publication Date: 2022-05-24
CHONGQING 2D MATERIALS INST OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the purpose of the present invention is to provide a vacuum control system for a roll-to-roll coating machine, which solves the problem that the existing roll-to-roll coating machine vacuum system requires a higher pressure on the vacuum pump

Method used

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  • Vacuum-pumping control system and control method for roll-to-roll coating machine

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Embodiment Construction

[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0030] like figure 1 and figure 2 As shown, a vacuum control system of a roll-to-roll coating machine of the present invention:

[0031]The vacuuming control system includes a controller, two primary vacuuming units 2 and a deep vacuuming unit 3 connected to the controller, and the two primary vacuuming units 2 act on the first vacuum on one side of the coating chamber 1 respectively. The chamber 101, the second chamber 102, the t...

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Abstract

The invention relates to the field of vacuum coating, and discloses a vacuum-pumping control system of a roll-to-roll coating machine, which comprises a controller, and two primary vacuum-pumping units and a deep vacuum-pumping unit which are connected with the controller, the two primary vacuumizing units respectively act on a first chamber, a second chamber, a third chamber and a fourth chamber on one side of the coating chamber, and the deep vacuumizing unit acts on a fifth chamber, a sixth chamber and a seventh chamber on the two sides of the coating chamber. According to the vacuum coating machine, rapid vacuumizing of the vacuum coating machine can be achieved, and the vacuum degree in the coating chamber meets the working requirement; in addition, the vacuum degree in the multiple transition cavities can be gradually increased from the two sides to the middle, the requirement and pressure for a vacuum pump are reduced, the requirement and pressure for sealing structures on the two sides are reduced, and energy consumption is reduced; and meanwhile, the high vacuum degree of the coating chamber is maintained through the high vacuum degree of the chambers on the two sides, so that the high vacuum degree in the coating chamber is more stable, and the coating quality and efficiency are improved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuuming control system and a control method of a roll-to-roll coating machine. Background technique [0002] Vacuum coating mainly refers to a type of coating that needs to be carried out under high vacuum, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is to divide it into two types: evaporation and sputtering. The roll-to-roll coating machine refers to the vacuum coating equipment with the unwinding mechanism and the winding mechanism respectively installed at the head and tail ends outside the vacuum coating machine. The roll-to-roll coating machine can make the substrate continuously pass through the vacuum coating machine to realize the continuous coating. [0003] The interior of the roll-to-roll coating ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/56C23C14/30
CPCC23C14/54C23C14/562C23C14/30Y02E60/10
Inventor 曹蔚琦金湛骆中涛孟晓敏夏文豪冯霜
Owner CHONGQING 2D MATERIALS INST OF CHINA
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