Vacuum-pumping control system and control method for roll-to-roll coating machine
A control system and vacuum pumping technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of vacuum pump requirements and high pressure, reduce requirements and pressure, reduce energy consumption, improve Effect of Coating Quality and Efficiency
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[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0030] like figure 1 and figure 2 As shown, a vacuum control system of a roll-to-roll coating machine of the present invention:
[0031]The vacuuming control system includes a controller, two primary vacuuming units 2 and a deep vacuuming unit 3 connected to the controller, and the two primary vacuuming units 2 act on the first vacuum on one side of the coating chamber 1 respectively. The chamber 101, the second chamber 102, the t...
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