Vacuum plasma machine capable of rapidly vacuumizing on line

Abstract

The invention relates to the technical field of plasma machine structures, and particularly discloses a vacuum plasma machine capable of rapidly vacuumizing on line. The vacuum plasma machine comprises an outer machine frame, and an inner cavity is formed in the outer machine frame; a negative pressure storage bin and a plasma vacuum bin arranged on the lower side face of the negative pressure storage bin are arranged in the inner cavity; a vacuum pump device is further arranged in the inner cavity and connected with a vacuum check loop pipe; the vacuum check loop pipe is connected with a first branch pipe and a second branch pipe; the negative pressure storage bin communicates with the vacuum check loop pipe through the first branch pipe, the plasma vacuum bin communicates with the vacuum check loop pipe through the second branch pipe, and the first branch pipe communicates with the second branch pipe; the vacuum plasma machine further comprises a moving table, and a conveying belt is arranged on the moving table. and a workpiece table is further arranged on the conveying belt. According to the vacuum plasma machine, the vacuumizing time can be greatly shortened, and the working efficiency is greatly improved.

Description

technical field [0001] The invention relates to the technical field of plasma machine structure, in particular to an online fast vacuum plasma machine. Background technique [0002] At present, plasma cleaning machines are widely used in the market. Plasma cleaning machines are generally divided into atmospheric pressure plasma cleaning machines and vacuum plasma cleaning machines, or plasma surface treatment machines. It is a new high-tech technology. The (active) components include: ions, electrons, atoms, active groups, nuclides in excited states (metastable states), photons, etc. The plasma cleaning machine is to use the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning and coating. [0003] At present, vacuum plasma cleaning machines are more and more widely used. During the use of traditional vacuum plasma cleaning machines, they need to run for a certain period of time for vacuuming, and the time for va...

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Problems solved by technology

[0003] At present, vacuum plasma cleaning machines are more and more widely used. During the use of traditional vacuum plasma cleaning machines, they need to run for a certain period of time for vacuuming, and the time for vacuuming is relatively long, which leads to the operation of the entire program and requires operation. People wait for a long time, work efficiency is low, and production costs are increased

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