Method for realizing long-term stable performance of in-vivo pressure sensor
A pressure sensor, long-term performance technology, applied in the field of medical devices, can solve problems such as inability to work stably for a long time, achieve good stability, good practicability, and avoid mutual penetration.
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[0019] This embodiment relates to a technical method of a long-term in-body pressure sensor module, specifically including:
[0020] Step 1) PDMS film 3 first deposits a layer of dense parylene coating 4, both of which form a composite film structure, such as figure 2 shown. The composite membranes 3 and 4 are cut according to the opening size of the pressure chamber 2 .
[0021] Step 2) Embed the pressure sensor bare chip 9 into the PCB adapter board 8, and fix the relative position of the two by glue, and connect the pad of the pressure sensor die 9 to the pad of the PCB adapter board 8 through a binding wire 10 ; The connecting wire 7 is welded on the PCB adapter board 8, and extends to the interior of the electronic capsule through the via hole on the pressure chamber 2 to connect with the main control circuit. The connecting wire via holes on the pressure chamber 2 are sealed with glue; the pressure sensor die 9 , the PCB adapter board 8 , the binding wire 10 and the e...
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