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Long-stroke quasi-zero-rigidity flexible guide mechanism

A flexible guide mechanism, quasi-zero stiffness technology, applied in the field of precision instruments and machinery, can solve problems such as the inability to guarantee a large stroke constant force output

Active Publication Date: 2022-04-08
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] In view of this, the present invention aims to propose a long-stroke quasi-zero-stiffness flexible guide mechanism to solve the problem that the existing flexible guide mechanism cannot guarantee large-stroke constant force output

Method used

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Embodiment Construction

[0027] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. It should be noted that, in the case of no conflict, the embodiments and the features in the embodiments of the present invention can be combined with each other, and the described embodiments are only some of the embodiments of the present invention, but not all of the embodiments.

[0028] see Figure 1-5 Describe this embodiment, a long-stroke quasi-zero-stiffness flexible guide mechanism, which includes an indirect drive part 1, a direct drive part 6, a first positive stiffness reed assembly 2, a second positive stiffness reed assembly 11, and a negative stiffness reed The component 7 and the linear motor drive module 10, the left and right sides of the direct drive component 6 are respectively connected to the two indirect drive components 1 through two first positive stiffne...

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Abstract

The invention provides a long-stroke quasi-zero-rigidity flexible guide mechanism, and belongs to the technical field of precise instruments and machinery. The problem that an existing flexible guide mechanism cannot guarantee large-stroke constant force output is solved. The linear motor driving device comprises indirect driving parts, a direct driving part, first positive rigidity reed assemblies, second positive rigidity reed assemblies, negative rigidity reed assemblies and a linear motor driving module, and the left side and the right side of the direct driving part are connected with the two indirect driving parts through the two first positive rigidity reed assemblies correspondingly. The front sides and the rear sides of the two indirect driving parts are connected with the two fixing assemblies through the two second positive-rigidity reed assemblies correspondingly, the first positive-rigidity reed assemblies and the second positive-rigidity reed assemblies are the same in structure, and the left side and the right side of the direct driving part are connected with one ends of the negative-rigidity reed assemblies correspondingly. The other ends of the two negative stiffness reed assemblies are connected with negative stiffness reed fixing assemblies, and the linear motor driving module is connected with the direct driving component.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and machinery, in particular to a long-stroke quasi-zero-rigidity flexible guiding mechanism. Background technique [0002] The extreme ultraviolet lithography machine is the most advanced lithography machine at this stage. The device uses extreme ultraviolet light with a wavelength of 13.5nm as the working light source, and has the highest lithography resolution. Extreme ultraviolet light is opaque to almost all substances and has a refractive index close to 1. Therefore, the illumination system, objective lens system and motion system of the extreme ultraviolet lithography machine must be placed in a vacuum. Common guiding mechanisms, such as ball screw guiding mechanisms, air-floating guiding mechanisms, and magnetic-floating guiding mechanisms, cannot be applied to extreme ultraviolet lithography machines due to their own characteristics and difficulty in maintenance. With its ...

Claims

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Application Information

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IPC IPC(8): G03F7/20
Inventor 吴剑威张银李一帆赵鹏越晏祯卓
Owner HARBIN INST OF TECH
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