Integrated optics-based pressure sensor capable of being customized quickly and customization method

A pressure sensor and integrated optics technology, applied in the direction of fluid pressure measurement using optical methods, can solve problems such as rising production costs, and achieve the effect of breaking through the upper limit of pressure, quickly customizing the range, and realizing ultra-high sensitivity pressure measurement

Active Publication Date: 2022-03-04
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as mentioned earlier, the custom cycle of three to four months for integrated optical sensors is quite slow
In addition, when the required number of sensors is small (less than 10), its production cost also increases significantly
Because the cost of the mask plate is 20,000, this cost needs to be amortized to each device

Method used

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  • Integrated optics-based pressure sensor capable of being customized quickly and customization method
  • Integrated optics-based pressure sensor capable of being customized quickly and customization method
  • Integrated optics-based pressure sensor capable of being customized quickly and customization method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] A pressure sensor with a range of 0-80 MPa based on a pressure block and a Mach-Zehnder structure, the sensor includes a pressure-bearing shell, a pressure block 2 and an optical chip 1 based on a Mach-Zehnder structure;

[0058] The pressure shell includes an upper pressure shell 3 and a lower pressure shell 4. The upper pressure shell 3 is provided with an upper groove 13, and the lower pressure shell 4 is provided with a lower groove 14. One side of the lower groove 14 A pressure block fixing groove 5 is provided,

[0059] The optical chip 1 is fixed in the lower groove 14, the optical chip 1 is provided with a pressure block 2, the pressure block 2 is embedded in the pressure block fixing groove 5, and penetrates the upper pressure-bearing shell 3 through the pressure block penetration hole 12;

[0060] The upper bottom surface of the pressure block 2 is used to contact the pressure to be measured; the lower bottom surface of the pressure block 2 is used to contact ...

Embodiment 2

[0076]A method for customizing a pressure sensor with a range of 0-120 MPa based on a pressure block and a Mach-Zehnder structure, the measurement system is the same as that in Embodiment 1, and the parameters and characteristics of the optical chip 1 are also the same.

[0077] In this embodiment, the pressure block 2 is manufactured by traditional metal processing. Traditional metal processing methods include turning and cutting processes. The cost of traditional machining is lower, and the development cycle is very short. With special machine tools and workers, the daily output can reach hundreds of pieces.

Embodiment 3

[0079] Embodiment 1 provides a method for customizing a pressure sensor based on a pressure block and a Mach-Zehnder structure with a range of 0-80 MPa, the method comprising:

[0080] Customize the maximum range A of the pressure sensor according to your needs 1 , calculate the sensitivity design value of the required custom pressure sensor

[0081] The measurement system used includes a wide-spectrum light source, an optical chip 1 and a spectrometer. The spectral range of the broadband light source is 1530-1570nm. The waveguide material of the optical chip 1 is silicon dioxide, and the cross-section of the waveguide is 4 μm 2 square, the core / cladding refractive indices are 1.47459 and 1.4448, respectively. The structure of the optical chip 1 is as figure 2 As shown, the length of the short interference arm 9 is 20 mm, and the length of the long interference arm 8 is 20 mm+82.68 μm. At 1550 nm, the effective refractive index of the waveguide is 1.4622. At this time, ...

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Abstract

The invention relates to a pressure sensor capable of being customized quickly based on integrated optics and a customization method, the sensor comprises a metal shell, a pressure block and an optical chip of a Mach-Zehnder structure, and the Mach-Zehnder structure comprises an input splitter, two interference arms with different lengths and an output beam combiner. When the measurement range is required to be customized, the sensitivity required by the device can be calculated according to different pressure ranges, and the shape of the pressure block is further determined. Customization of the pressure block can be completed through 3D metal printing or traditional machining, and rapid customization can be completed within the period of 1-2 days. And the customization cost is far lower than that of a traditional mode of redesigning and manufacturing a mask plate. According to the scheme provided by the invention, the measurement range of 0-500MPa, such as explosion pressure measurement, can be realized; and pressure measurement with a small range and extremely high sensitivity, such as vacuum degree measurement, can also be realized.

Description

technical field [0001] The invention relates to a rapidly customizable pressure sensor based on integrated optics and a customization method, belonging to the technical field of pressure measurement. Background technique [0002] Pressure sensors are mainly used in the automotive industry, automatic control, aerospace and navigation, medical and health and military, etc., and have a wide range of applications. Sensors based on optical principles have theoretically higher precision, and have the characteristics of insulation, anti-electromagnetic interference, and high integration. They are widely used in the fields of biomolecular detection, environmental pollution control, and chemical process control. Integrated optical sensor is an important type of optical sensor. It uses semiconductor processing technology to make various optical microstructures to achieve optical measurement. It has the characteristics of low cost. Compared with the optical sensor of discrete component...

Claims

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Application Information

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IPC IPC(8): G01L11/02
CPCG01L11/02
Inventor 尹锐曹令鑫黄庆捷吕琳
Owner SHANDONG UNIV
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