Flexible film platinum resistance sensor and preparation method thereof

Abstract

The invention relates to the technical field of microelectronic machinery, and particularly discloses a flexible film platinum resistance sensor which comprises a flexible platinum resistance sensor substrate, the flexible platinum resistance sensor substrate comprises a polyimide base material layer, a platinum resistance wire middle layer and a polyimide covering layer, the platinum resistance wire middle layer comprises a platinum resistance wire and a sealant, the two ends of the platinum resistance wire are connected with wires, and the connecting parts of the platinum resistance wire and the wires are located in the platinum resistance wire middle layer. The polyimide base material layer and the polyimide covering layer are made of polyimide films with the thickness of 0.03-0.05 mm; the thickness of the platinum resistance wire middle layer is 0.05-0.08 mm, and the sealant is polyimide glue. According to the flexible film platinum resistance sensor, the platinum resistance sensor substrate is soft, light and thin in texture and can be tightly attached to the surface of a measured object, measurement errors caused by the fact that the sensor cannot be tightly contacted with a complex surface are avoided, and the flexible film platinum resistance sensor is high in test accuracy and good in stability.

Description

technical field [0001] The invention belongs to the technical field of microelectronic machinery, and in particular relates to a flexible thin-film platinum resistance sensor and a preparation method thereof. Background technique [0002] In order to monitor the status of various systems of rail vehicles, various sensors are widely used in various areas of the vehicle, the most common of which is the temperature sensor, and the most commonly used temperature sensor is the platinum resistance temperature sensor. As a temperature measurement sensor, platinum resistance thermometer has the advantages of large measurement range, good stability, high reproducibility of indication value and oxidation resistance. Nearly one-third of the thin-film platinum resistance sensors at home and abroad are thin-film resistance sensors made by sputtering and depositing metal platinum on a ceramic substrate in a vacuum state and adjusting the resistance by laser. At present, the commonly used...

AI Technical Summary

Problems solved by technology

At present, the commonly used platinum resistance temperature measurement sensor is not suitable for measuring the surface temperature due to its relatively hard texture and large heat capacity due to the relatively long thermal response time of the ceramic substrate. There are large errors in the temperature test results, and the system components in the vehicle are basically for curved or irregular surfaces

In addition, the structure of the thin-film resistance sensor is not sufficiently sealed, causing the sensor to get wet and malfunction during actual operation, resulting in false alarms or flashing high and low temperature

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