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Processing method of cadmium oxide target material

A processing method and cadmium oxide technology, which are applied in metal processing equipment, manufacturing tools, machine tools suitable for grinding workpiece planes, etc., can solve the problems of inability to effectively control the surface roughness of the target material, low processing efficiency, and surface chipping. , to achieve the effect of improving processing effect, improving quality and reducing heat consumption and wear

Pending Publication Date: 2021-12-31
XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the prior art cadmium oxide target processing methods, the roughness of the target surface cannot be effectively controlled, and some processes even cause defects such as chipping and cracking on the surface, and the processing efficiency is generally low

Method used

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  • Processing method of cadmium oxide target material
  • Processing method of cadmium oxide target material
  • Processing method of cadmium oxide target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] An embodiment of the processing method of the cadmium oxide target in the present invention, the process is as follows figure 1 shown, including the following steps:

[0026] (1) Check the size, density and surface integrity of the cadmium oxide rotating target to avoid abnormal raw materials, and start the processing equipment at the same time;

[0027] (2) Processing of the inner circle of the target: Place the cadmium oxide target on the chuck of the grinder, adjust the air pressure of the pneumatic chuck to 0.3MPa to clamp the target, align it with the position of the tool feed, and perform the inner circle position of the target in turn. Rough machining and finishing treatment; the rough machining process adopts a resin diamond grinding wheel with a grinding wheel mesh number of 60 meshes, and the finishing treatment adopts a grinding wheel mesh number of 250 mesh resin diamond grinding wheels to carry out;

[0028] The rotational speed of the resin diamond grindi...

Embodiment 2

[0038] An embodiment of the processing method of the cadmium oxide target in the present invention comprises the following steps:

[0039] (1) Check the size, density and surface integrity of the cadmium oxide rotating target to avoid abnormal raw materials, and start the processing equipment at the same time;

[0040] (2) Processing of the inner circle of the target: Place the cadmium oxide target on the chuck of the grinder, adjust the air pressure of the pneumatic chuck to 0.3MPa to clamp the target, align it with the position of the tool feed, and perform the inner circle position of the target in turn. Rough machining and finishing treatment; the rough machining process adopts a resin diamond grinding wheel with a grinding wheel mesh number of 60 meshes, and the finishing treatment adopts a grinding wheel mesh number of 250 mesh resin diamond grinding wheels to carry out;

[0041] The rotational speed of the resin diamond grinding wheel during the rough processing is set ...

Embodiment 3

[0051] An embodiment of the processing method of the cadmium oxide target in the present invention comprises the following steps:

[0052] (1) Check the size, density and surface integrity of the cadmium oxide rotating target to avoid abnormal raw materials, and start the processing equipment at the same time;

[0053] (2) Processing of the inner circle of the target: Place the cadmium oxide target on the chuck of the grinder, adjust the air pressure of the pneumatic chuck to 0.3MPa to clamp the target, align it with the position of the tool feed, and perform the inner circle position of the target in turn. Rough machining and finishing treatment; the rough machining process adopts a resin diamond grinding wheel with a grinding wheel mesh number of 60 meshes, and the finishing treatment adopts a grinding wheel mesh number of 250 mesh resin diamond grinding wheels to carry out;

[0054] The rotational speed of the resin diamond grinding wheel during the rough processing is set ...

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Abstract

The invention discloses a processing method of a cadmium oxide target material, and belongs to the field of target material processing. According to the processing method of the cadmium oxide target material, through the reasonable processing steps and sequence, the number of grinding wheels suitable for the target material is selected and reasonable processing parameters are set, so that the quality of a processed product is effectively improved, the surface roughness of the target material is regulated and controlled to meet the application requirements, and the outer circle of the target material meets the requirement of a sputtering face. Meanwhile, the surface of the outer circle can meet the qualified binding rate requirement of the welding flux and the back plate. By using the coolant, the processing effect of the target material can be improved, the problem of surface cracks of the target material due to local overheating in the course of processing is avoided, meanwhile, the heat consumption wear of a processing appliance can be reduced, the replacement frequency of the appliance is further reduced, and the processing efficiency of the target material is improved.

Description

technical field [0001] The invention relates to the field of target processing, in particular to a processing method for a cadmium oxide target. Background technique [0002] Transparent conductive films are mainly divided into three categories: metal films, oxide films, and other compound films. Among them, oxide films have attracted the attention of many researchers because of their stable performance. Among them, cadmium oxide film has become one of the most widely studied oxide films in recent years because of its excellent electrical and optical properties: cadmium oxide is a new type of semiconductor oxide, and its band gap is about 2.2eV. The cadmium thin film is transparent and light yellow, and has high optical transmittance in the visible light range (380-780nm). It is a thin film with high mobility and high carrier concentration. It is widely used in windows and photosensitive Detectors and other electronic devices. When cadmium oxide is doped with In elements, ...

Claims

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Application Information

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IPC IPC(8): B24B5/50B24B5/06B24B5/04B24B7/16B24B27/06B24B55/02
CPCB24B5/50B24B5/06B24B5/04B24B7/16B24B27/06B24B55/02
Inventor 周荣艳植锐俊文崇斌
Owner XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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