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Flexible mechanism-based macro-micro coupling trochoid micro-nano scratch testing machine

A flexible mechanism, scratch test technology, applied in the direction of strength characteristics, measuring devices, instruments, etc., can solve the problems of insufficient processing ability of complex surface structures, high assembly accuracy requirements, and difficulty in miniaturization, and achieve continuous large-stroke working range. , Good disassembly, reliable equipment operation

Pending Publication Date: 2021-12-14
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that most of the micro-nano processing structures adopt rigid structure, which requires high assembly precision, and the stroke is small, it is difficult to miniaturize, and the processing ability of complex surface structures is insufficient, and the macro-micro coupling based on flexible mechanism is proposed. Trochoidal micro-nano scratch test machine

Method used

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  • Flexible mechanism-based macro-micro coupling trochoid micro-nano scratch testing machine
  • Flexible mechanism-based macro-micro coupling trochoid micro-nano scratch testing machine
  • Flexible mechanism-based macro-micro coupling trochoid micro-nano scratch testing machine

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specific Embodiment approach 1

[0023] Specific implementation mode one: combine Figure 1 to Figure 11 Describe this embodiment, the macro-micro coupling trochoidal micro-nano scratch testing machine based on the flexible mechanism in this embodiment includes a mounting table 1, a sample disk carrying assembly, a sample disk 5, a cutter head mounting assembly, and a cutter head 10 and a back plate 11; the sample disc carrying assembly is installed on the upper surface of the mounting table 1, the sample plate 5 is installed on the sample plate carrying assembly, and the back plate 11 is vertically fixed on the upper surface of the mounting table 1, The cutter head installation assembly is installed on the upper part of the back plate 11 , the cutter head 10 is installed on the cutter head assembly, and the cutter head 10 is located above the sample disk 5 .

[0024] Threaded holes are formed on the table surface of the mounting table 1 and are connected with the adjusting feet 2 . The air-floating guide ra...

specific Embodiment approach 2

[0025] Specific implementation mode two: combination Figure 1 to Figure 11 To illustrate this embodiment, the sample plate carrying assembly of the flexible mechanism-based macro-micro-coupling trochoidal micro-nano scratch testing machine in this embodiment includes a plurality of adjustment legs 2, air-floating guide rails 3 and a micro-movement platform 4 ; The air-floating guide rail 3 is installed on the upper surface of the installation table 1, and the lower surface of the air-floating guide rail 3 is provided with a plurality of adjusting legs 2, the micro-movement platform 4 is installed on the air-floating guide rail 3, and the sample disc 5 is fixed on the micro-movement Platform 4 upper surface.

[0026] The micro-motion platform 4 has three degrees of freedom around X, around Y and along the Z axis; wherein, the main function of the degrees of freedom around X and around Y is to adjust the parallelism between the sample disk 5 and the air bearing guide rail 3, re...

specific Embodiment approach 3

[0029] Specific implementation mode three: combination Figure 1 to Figure 11 Describe this embodiment, the micro-movement platform 4 of the macro-micro coupling trochoidal micro-nano scratch test machine based on the flexible mechanism in this embodiment includes a mounting base plate 41, a plurality of piezoelectric ceramics 42, a plurality of capacitance sensors, capacitance sensors Bracket 43 and three-degree-of-freedom flexible hinge structure 44; the installation base plate 41 is horizontally installed on the air bearing guide rail 3, the three-degree-of-freedom flexible hinge structure 44 is installed on the upper surface of the installation base plate 41, and a plurality of piezoelectric ceramics 42 are evenly distributed along the circumferential direction Installed on the three-degree-of-freedom flexible hinge structure 44 , the capacitive sensor bracket 43 is installed in the three-degree-of-freedom flexible hinge structure 44 , and multiple capacitive sensors are in...

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Abstract

The invention relates to a scratch testing machine, in particular to a flexible mechanism-based macro-micro coupling trochoid micro-nano scratch testing machine, and relates to a scratch testing machine. The invention aims to solve the problems that most micro-nano machining structures adopt rigid structures, so that the requirements on assembly precision are very high, the stroke is small, the miniaturization is difficult, and the machining capability on complex surface structures is insufficient. The product comprises a mounting table, a sample disc bearing assembly, a sample disc, a cutterhead mounting assembly, a cutterhead and a back plate, the sample disc bearing assembly is mounted on the upper surface of the mounting table, the sample disc is mounted on the sample disc bearing assembly, the back plate is vertically fixed on the upper surface of the mounting table, the cutter disc mounting assembly is mounted on the upper portion of the back plate, and the cutter disc is mounted on the cutter disc mounting assembly and located above the sample disc. The invention belongs to the field of micro-nano processing and manufacturing.

Description

technical field [0001] The invention relates to a scratch test machine, in particular to a macro-micro coupling trochoidal micro-nano scratch test machine based on a flexible mechanism, which belongs to the field of micro-nano processing and manufacturing. Background technique [0002] With the development of high-end technologies such as aerospace, biomedicine, and national defense equipment, ultra-precision machining technology is more focused on high-precision, non-damaging surface preparation. However, traditional ultra-precision machining technologies, such as ultra-precision grinding, milling, etc., are difficult to clearly and accurately grasp the influence of their process parameters on the precision and damage of parts due to their extremely complex machining processes. As a key means of material characterization, micro-nano scratching technology plays a key role in the mechanical properties and processing properties of materials; with the emergence of atomic force ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/40
CPCG01N3/40G01N2203/0003G01N2203/0078
Inventor 林彬吕秉锐刘春艳曹中臣隋天一张晓峰赵菲菲
Owner TIANJIN UNIV
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