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Preparation method of electronic-grade choline hydroxide solution

An electronic-grade choline hydroxide technology, which is applied in the preparation of organic compounds, chemical instruments and methods, and the preparation of aminohydroxyl compounds, can solve the problems of low toxicity and side effects, and achieve clean production processes, safe production processes, and metal ion production. The effect of low content

Pending Publication Date: 2021-10-26
上海德迈世欧科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, because electronic grade choline hydroxide has the characteristics of strong alkalinity and very little toxic and side effects, it is widely used in semiconductor, display panel and other electronic industries, especially for the strict requirements on the cleanliness of products In the field of wafer manufacturing, electronic grade choline hydroxide solution has been irreplaceable as a cleaning agent

Method used

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  • Preparation method of electronic-grade choline hydroxide solution

Examples

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preparation example Construction

[0022] Such as figure 1 Shown, the preparation method of a kind of electronic grade choline hydroxide of the present application comprises the steps:

[0023] Mix trimethylamine and water in the reactor according to the molar ratio of 1:10, when the trimethylamine is completely dissolved, slowly feed ethylene oxide into the reactor. The molar ratio of trimethylamine and ethylene oxide is 1:1.05 for feeding. Strictly control the reaction temperature at 40-45°C, and the reaction pressure at 0.20Mpa. After the feeding of ethylene oxide is completed, the solvent reaction is completed after stirring for another 60 minutes.

[0024] After the reaction is completed, the residual trimethylamine in the choline hydroxide solution is distilled out by utilizing the waste heat in the reaction process under reduced pressure, and the control index is till the trimethylamine≤400ppm. When the sampling is qualified, the choline hydroxide solution is prepared, and the content is controlled to ...

Embodiment 1

[0052] Take trimethylamine with a content of 99% and high-purity water and send them into the reactor according to the molar ratio of 1:10. After the trimethylamine is completely dissolved, slowly add ethylene oxide into the reactor. The ratio is trimethylamine and The molar ratio of ethylene oxide is 1:1.05, the temperature is controlled at 40-45°C, the pressure is controlled at 0.20Mpa, and the excess heat is removed through the heat transfer medium.

[0053] After feeding, stir for 60 minutes, and remove residual trimethylamine under reduced pressure.

[0054] After removing excess trimethylamine, add a total amount of 2‰ stabilizer to the reactor and stir for 30 minutes to obtain 40-45% choline hydroxide solution, which is sent into a storage tank by mechanical pump for standby.

[0055] This experiment chooses this experiment to use the mechanical pump to send the choline hydroxide solution into the nitrogen-sealed finished product tank through micro-membrane filtration. ...

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Abstract

The invention relates to a preparation method for producing electronic-grade choline hydroxide. According to the method, ethylene oxide, trimethylamine and water react in a clean reactor to generate a mixture, and heat generated in the reaction process is removed through a conducting medium. Residual trimethylamine in the generated mixture is separated under the reduced pressure condition, so that 40%-45% (percentage content) is achieved, metal ions in choline hydroxide are removed through micro-membrane filtration at different temperatures and pressures, and the required purpose is achieved.

Description

technical field [0001] The invention belongs to the preparation method of chemical raw materials used in the semiconductor industry, in particular to the technical field of preparation of electronic grade choline hydroxide solution. Background technique [0002] Electronic Grade Choline Hydroxide (Electronic Grade Choline) is an organic choline which is the main reason it is chosen for many applications. It can be used in the production of choline salts by neutralization with appropriate acids, or in applications where strong bases containing very low levels of inorganic ions are required or can be tolerated, choline hydroxide is used in applications such as electronic device manufacturing The range of applications in the field is very wide. For example, because electronic grade choline hydroxide has the characteristics of strong alkalinity and very little toxic and side effects, it is widely used in semiconductor, display panel and other electronic industries, especially f...

Claims

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Application Information

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IPC IPC(8): C07C213/04C07C213/10C07C215/40
CPCC07C213/04C07C213/10C07C215/40
Inventor 贺妍冷若菲
Owner 上海德迈世欧科技有限公司
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