Batch processing type ion implantation method
An ion implantation and ion implanter technology, which is applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of many mechanical movements, increased process time, and increased particle risk, so as to reduce ion implantation time and improve The effect of particle defects, increasing the risk of product defects
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[0021] The technical solutions in this application will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.
[0022] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, use a specific orientati...
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