Energy storage polymer dielectric and preparation method and application thereof
A polymer and dielectric technology, applied in the direction of fixed capacitor dielectric, fixed capacitor parts, etc., can solve the problems of efficiency drop, loss increase, etc., and achieve the effect of small temperature rise, dense uniformity, and easy control of preparation parameters
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[0041] Using polyetherimide dielectric film as the base material (purchased from Polyk, USA), ultrasonically removed impurities and dirt on the surface in alcohol; company) for magnetron sputtering with a distance of 10 cm between target and substrate in Ar and O 2 (40:4) In the mixed atmosphere, magnetron sputtering was used to deposit Al2O3 on the surface of the film, and the working pressure was 0.5Pa; the sputtering time was adjusted according to the thickness, and the sputtering thickness was 150nm; the sputtering power was 200W . Metal oxide thin films were deposited on both sides of the original polymer dielectric base film to obtain energy storage polymer dielectric samples.
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