Optoelectronic device
A technology of optoelectronic devices and electrodes, applied in optics, nonlinear optics, instruments, etc., can solve problems such as reducing EAM performance
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[0090] figure 1 A top view of the optoelectronic device 100 is shown. The input waveguide 101 guides light into a rib waveguide comprising a ridge portion 102 and a slab portion 103 atop a silicon-on-insulator layer 202 . The ridge portion may eg comprise or provide an electroabsorption modulator (EAM) or photodiode structure. Depending on the nature of the ridge portion of the rib waveguide, light may exit the device through the output waveguide 104 . An electrical pad 105, which may be formed from titanium or aluminum, is connected to the rib and plate portions. Typically, the electrodes are formed from 1 μm thick aluminum and may include a 10 nm thick titanium layer between the aluminum and the plate as an electrical barrier. The heater 106 is disposed on top of a part of the flat plate portion 103 . The heater is formed of a substantially elongated metal strip located at a distance of not less than 2 μm from the ridge portion 102 of the rib waveguide. The heaters are ...
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