A kind of flexible thermal convection type acceleration sensor and preparation method thereof

Abstract

The invention discloses a flexible thermal convection type acceleration sensor and a preparation method thereof. The sensor includes a flexible substrate, a flexible sealing top cover, an S-shaped heating element, an S-shaped temperature sensing element and a heat-absorbing thin layer; the flexible top cover is arranged on a flexible On the substrate, a sealed cavity is formed between the two; the S-shaped heating element is fixed in the center of the flexible substrate in the sealed cavity; two S-shaped temperature sensing elements are fixed on the flexible substrate in the sealed cavity, and are symmetrically distributed Both sides of the S-shaped heating element; the heat-absorbing thin layer is closely attached to the S-shaped heating element inside the sealed cavity; among them, the flexible sealing top cover has a thermal insulation island structure, and the two thermal insulation island structures are symmetrical along the long axis Distributed on the inner surface of the top of the flexible sealing top cover, and distributed above between the S-shaped heating element and the S-shaped temperature sensing element. The acceleration sensor of the invention is suitable for flexible devices and has the characteristics of high sensitivity, fast response time and low power consumption. The preparation method is simple, the cost is low, and it can be prepared on a large scale.

Description

technical field [0001] The invention relates to a flexible acceleration sensor, in particular to a high-sensitivity thermal flexible acceleration sensor. Background technique [0002] The acceleration sensor is a sensing device that measures the magnitude and direction of the acceleration acting on the system, and is widely used in various fields. For example, airbags in cars, suspensions for attitude control, etc., are typical scenarios for acceleration sensor applications. At present, with the continuous construction of the Internet of Things, its application scope is rapidly expanding. An increasing number of small devices such as smartphones, tablets, and fitness bands are also incorporating accelerometers. With the application of acceleration sensors in advanced small electronic devices, higher requirements are put forward for the performance and structural characteristics of acceleration sensors. Common acceleration sensors can be divided into capacitive, piezoelect...

AI Technical Summary

Problems solved by technology

However, the silicon material used limits the deformability of the sensor substrate, and it is difficult to have a high degree of fit in emerging smart medical, robotics and other application fields that require curved surfaces; and is limited by the viscosity and heating power of thermal fluids Compared with the structure of other working principles, thermal convection acceleration sensor has lower sensitivity, which limits its application to a certain extent

Images