Laser-induced breakdown spectroscopy element analysis system

Abstract

The invention relates to the technical field of laser-induced breakdown spectroscopy and particularly relates to a laser-induced breakdown spectroscopy element analysis system. The system comprises a sample chamber, and a sampling platform, a spectrograph, a laser, a condensing lens, a camera, a scanning device, an integrated blowing device, a lighting device and a computer are arranged in the sample chamber, wherein the laser comprises a main laser and an auxiliary laser which are orthogonally arranged, the main laser vertically bombards the surface of a sample, the auxiliary laser horizontally bombards the cross section of an ablation plume excited by the main laser from the side face, so a radiation signal of plasma is remarkably enhanced, and the focusing lens is used for focusing pulses emitted by the laser; compared with a single-pulse LIBS (laser-induced breakdown spectroscopy) system, the measurement process management unit supports a user to flexibly adjust different wavelengths and powers to use the laser and adjust parameters such as the interval time and the focus position of double pulses, and the system is very suitable for LIBS mechanism research and industrial application requirements.

Description

technical field [0001] The invention relates to the technical field of laser-induced breakdown spectroscopy, in particular to a laser-induced breakdown spectroscopy elemental analysis system. Background technique [0002] In many occasions, it is necessary to perform scanning imaging and content analysis of the elements in the sample. Traditional spectral analysis methods, such as atomic absorption spectroscopy, atomic fluorescence spectroscopy, inductively coupled plasma-atomic emission spectroscopy and inductively coupled plasma-mass spectrometry, etc. Generally, pretreatment of the sample is required, and the analysis speed is slow; the laser-induced breakdown spectroscopy (LIBS) technology based on low repetition rate is an atomic spectrum analysis technology, which focuses a beam of high-energy pulsed laser on The surface of the sample to be analyzed generates high-temperature plasma, and a small amount of material stripped by the laser is atomized and ionized in the hi...

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Problems solved by technology

[0002] In many occasions, it is necessary to perform scanning imaging and content analysis of the elements in the sample. Traditional spectral analysis methods, such as atomic absorption spectroscopy, atomic fluorescence spectroscopy, inductively coupled plasma-atomic emission spectroscopy and inductively coupled plasma-mass spectrometry, etc. Generally, pretreatment of the sample is required, and the analysis speed is slow; the laser-induced breakdown spectroscopy (LIBS) technology based on low repetition rate is an atomic spectrum analysis technology, which focuses a beam of high-energy pulsed laser on The surface of the sample to be analyzed generates high-temperature plasma, and a small amount of material stripped by the laser is atomized and ionized in the high-temperature plasma, and emits characteristic spectral radiation of atoms or ions. The concentration of elements in the sample can be determined by analyzing the spectral intensity. (or content) analysis, this technology has the characteristics of no need for complicated sample pretreatment process, can realize industrial online and long-distance analysis, etc., is widely used in elemental analysis in various occasions, and can also realize two-dimensional elemental analysis of solid samples Distributed scanning imaging analysis, however, the existing LIBS technology is generally carried out based on pulsed lasers with a low repetition rate (generally 10 Hz), that is to say, even if it is a single sampling, the frequency of data acquisition is only 10 Hz, It leads to slow analysis speed, especially if it is necessary to complete a high-resolution two-dimensional element distribution scanning image, it will take a long time, so it is urgent to improve

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