Surface treatment device and workpiece surface treatment method

A technology for surface treatment devices and workpieces, applied in the direction of grinding drive devices, grinding/polishing safety devices, manufacturing tools, etc., can solve the problems of complex spindle structure and single function, and achieve rich functions, high mechanical precision, and maintenance The effect of precision

Pending Publication Date: 2021-07-23
苏州赛万玉山智能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The grinding and polishing machine tool includes a main shaft, which is connected to drive its rotation structure. The main shaft is provided with a structure for installing workpieces or abrasive tools, such as vacuum suction channels, jaws, etc.; at the same time, a cooling structure is required to cool the main shaft. The structure of the main shaft is relatively complicated
In addition, this kind of spindle is only used to install workpieces or grinding tools, and its function is relatively simple

Method used

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  • Surface treatment device and workpiece surface treatment method
  • Surface treatment device and workpiece surface treatment method
  • Surface treatment device and workpiece surface treatment method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0081] The surface treatment device disclosed by the present invention will be described below with reference to the accompanying drawings, and the surface treatment device is applicable to any plane grinding conditions. It is especially suitable for flattening processing of semiconductor materials, such as single crystal silicon, single crystal silicon carbide, sapphire single crystal, semiconductor wafers, chips, and optoelectronic and ceramic materials, subverting the traditional processing technology and mode.

[0082] as attached figure 1 As shown, the surface treatment device includes a grinding tool spindle 10 and a workpiece spindle 20, at least one of which is connected to a feed drive mechanism (not shown) that drives its axial feed relative to the other, namely In one mode, the workpiece spindle 20 does not feed, and the grinding tool spindle 10 feeds to the workpiece spindle 20; in another mode, the grinding tool spindle 10 does not feed, and the workpiece spindle ...

Embodiment 2

[0116] as attached Figure 8 As shown, the overall structure of this embodiment is similar to that of Embodiment 1, the difference is that: the grinding tool spindle 10 and the workpiece spindle 20 are not coaxial, that is, the axes 103, 203 of the grinding tool spindle 10 and the workpiece spindle 20 are parallel (their axes are staggered) and their opposite end faces 101, 201 are partially overlapped (that is, the projections of their opposite end faces on the projection plane parallel to the opposite end faces are partially coincident), and the opposite end faces 101 of the grinding tool spindle 10 are altogether The shaft is provided with a grinder 30 and the opposite end face 201 of said workpiece spindle 20 is coaxially provided with a workpiece 40 .

[0117] In one way, the grinding tool 30 can directly cover the surface to be processed of the workpiece 40, at this time, at least one of the grinding tool spindle 10 and the workpiece spindle 20 can be connected to an aut...

Embodiment 3

[0128] In the above-mentioned embodiments 1 and 2, the semi-finishing tool spindle 10 and the workpiece spindle 20 are all one. When grinding or polishing with different precision is required, the corresponding surface treatment needs can be realized by replacing different abrasive tools. Such a process is time-consuming strenuous. as attached Figure 12 - attached Figure 15 As shown, so compared with the above-mentioned embodiments 1 and 2, the difference in this embodiment is that: the workpiece spindle 20 in the surface treatment device is one, and the grinding tool spindle 10 is multiple, and according to a certain Track arrangement; the workpiece spindle 20 can move to the state of the above-mentioned embodiment 1 with each of the grinding tool spindles, or the workpiece spindle 20 can move to reach the above-mentioned embodiment 2 with each of the grinding tool spindles status. And in this embodiment, only the workpiece spindle 20 can be fed, and the plurality of gri...

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PUM

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Abstract

The invention discloses a surface treatment device and a workpiece surface treatment method. The surface treatment device comprises a workpiece main shaft connected with a feed driving mechanism, and / or a group of grinding tool main shafts, the workpiece main shaft can move to be coaxial with each grinding tool main shaft or parallel to the axis, and the opposite end faces of the workpiece main shaft and each grinding tool main shaft coincide partially. The workpiece main shaft and / or each grinding tool main shaft are / is connected with an autorotation driving mechanism. A grinding tool is coaxially arranged at one end, facing the workpiece main shaft, of each grinding tool main shaft. All the grinding tool main shafts and / or the workpiece main shafts are freezing main shafts, freezing runners are formed in main shaft bodies of the freezing main shafts, inlets and outlets of the freezing runners are located in the back end faces of the main shaft bodies and extend to the opposite end areas of the main shaft bodies from the back end faces of the main shaft bodies, and at least the opposite end areas are made of non-thermal insulation materials. The back end of each main shaft body is connected with a slip ring. The slip ring of the freezing main shaft is connected with a refrigerant supply device. According to the scheme, on the basis of grinding machining and multi-process integration, the freezing main shaft technology is adopted, and the machining efficiency and the convenience and functionality of equipment use are effectively improved.

Description

technical field [0001] The invention relates to the field of automatic high-precision surface treatment equipment, in particular to a surface treatment device, an assembly method thereof, and a workpiece or grinding tool disassembly method. Background technique [0002] Grinding and polishing are common surface treatment methods. Among them, grinding generally refers to a processing method that uses rough objects (sandpaper containing higher hardness particles, etc.) to change the physical properties of the material surface through friction. The main purpose is to obtain a specific surface roughness. Polishing refers to the use of mechanical, chemical or electrochemical action to reduce the surface roughness of the workpiece to obtain a bright and smooth surface. It is a modification process on the surface of the workpiece by using polishing tools and abrasive particles or other polishing media. [0003] Grinding and polishing machine tools are commonly used grinding and p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00B24B19/00B24B41/04B24B47/12B24B55/02
CPCB24B1/00B24B19/00B24B41/04B24B47/12B24B55/02
Inventor 万明
Owner 苏州赛万玉山智能科技有限公司
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