Preparation method of electronic-grade mixed acid etching solution
An electronic grade hydrofluoric acid and mixed acid technology, applied in the field of electronic chemicals, can solve the problems of unstable etching process rate, difficult to control etching process, unstable etching efficiency, etc. Unstable chemical reaction, improved effect of chemical etching process
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Embodiment 1
[0020] Embodiment 1: A kind of electronic grade mixed acid (HF, HNO 3 、H 2 SO 4 、HA C ) The preparation method of etching solution, which comprises the following steps: washing the mixed acid preparation tank lined with polytetrafluoroethylene coating with pure water. Transport electronic-grade hydrofluoric acid with a mass concentration of 48.5% to the hydrofluoric acid metering tank, and measure 315kg for standby; transport electronic-grade concentrated nitric acid with a mass concentration of 69% to the nitric acid metering tank, measure 373kg for standby; The concentrated sulfuric acid is transported to the sulfuric acid metering tank, measuring 215kg for standby; the acetic acid of grade above analytical purity is transported to the acetic acid metering tank, and measuring 370kg for standby. Put the measured acetic acid into the mixed acid preparation tank, and turn on the mixer at the same time; inject the measured electronic grade hydrofluoric acid into the mixed aci...
Embodiment 2
[0021] Embodiment 2: A kind of electronic grade mixed acid (HF, HNO 3 、H 3 PO 4 ) The preparation method of etching solution, which comprises the following steps: washing the mixed acid preparation tank lined with polytetrafluoroethylene coating with pure water. Transport electronic grade hydrofluoric acid with a mass concentration of 49.5% to the hydrofluoric acid metering tank, and measure 100kg for standby; transport electronic grade concentrated nitric acid with a mass concentration of 70% to the nitric acid metering tank, measure 450kg for standby; The phosphoric acid is transported to the phosphoric acid metering tank, and 200kg is measured for standby. Into the mixed acid preparation tank, inject the metered electronic grade hydrofluoric acid with a corrosion-resistant pump, and turn on the mixer at the same time; then inject the metered electronic grade concentrated nitric acid into the mixed acid preparation tank with another corrosion-resistant pump, Stir well; th...
Embodiment 3
[0022] Embodiment 3: A kind of electronic grade mixed acid (HF, HNO 3 、H 2 SO 4 、H 3 PO 4 ) The preparation method of etching solution, which comprises the following steps: washing the mixed acid preparation tank lined with polytetrafluoroethylene coating with pure water. Transport electronic-grade hydrofluoric acid with a mass concentration of 49% to the hydrofluoric acid metering tank, and measure 199kg for standby; transport electronic-grade concentrated nitric acid with a mass concentration of 70.5% to the nitric acid metering tank, measure 236kg for standby; The concentrated sulfuric acid is transported to the sulfuric acid metering tank, measuring 147kg for standby; the phosphoric acid of grade above analytical purity is transported to the phosphoric acid metering tank, and 721kg is measured for standby. Into the mixed acid preparation tank, inject the metered electronic grade hydrofluoric acid with a corrosion-resistant pump, and turn on the mixer at the same time;...
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