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Self-adaptive compensation ring cavity device and method for free-form surface interference detection

An adaptive compensation and interference detection technology, applied in the field of optical detection, can solve the problem of high cost and achieve the effect of low dynamic range

Active Publication Date: 2021-06-25
ANHUI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the cost of the dual DM cascaded adaptive compensator is very high, and the aberration coupling problem of the dual DM cascade needs to be solved, and the decoupling operation requires a special design

Method used

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  • Self-adaptive compensation ring cavity device and method for free-form surface interference detection
  • Self-adaptive compensation ring cavity device and method for free-form surface interference detection
  • Self-adaptive compensation ring cavity device and method for free-form surface interference detection

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Embodiment

[0045] Examples of the self-adaptive compensation annular cavity device and method applied to free-form surface interference detection according to the present invention are described as follows.

[0046] The measured free-form surface L4 is an unknown free-form surface on a flat base, with a diameter of 24mm, and its irregular shape deviation is obtained by mechanical extrusion.

[0047] figure 1 It is the diagram of the self-adaptive compensation ring cavity device for free-form surface interference detection. The laser wavelength is λ=632.8nm. The beam splitter S3 divides the 20mm collimated beam transmitted by the beam expander S2 into two parts, one of which is reflected by the first beam splitter S3, in order to ensure the contrast of the interferogram received by the detector in the final detection system, the beam splitter The reflection / transmission ratio is 0.5:0.5, 50% of the light energy is reflected by the first beam splitter S3, and the reflected light returns a...

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Abstract

The invention discloses a self-adaptive compensation ring cavity device and method for free-form surface interference detection, and belongs to the field of optical detection. The device comprises a polarization interference system (L1), a self-adaptive compensation ring cavity system (L2), a partial zero compensation mirror (L3) and a detected free-form surface (L4). According to the invention, a ring cavity structure is designed for aberration compensation by using a self-adaptive optical element deformable reflector, the aberration compensation amount is expanded to four times of a single DM compensation range along with multiple cyclic reflection of a light beam in the ring cavity, the aberration compensation range achieved by double-DM cascade is achieved by using only one DM, DM monitoring load and decoupling operation do not need to be added, so that the dynamic detection range of an interferometer is doubled in a low-cost manner. Free-form surface shape detection and DM surface monitoring are controlled by adopting a rotatable polaroid without any auxiliary equipment.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to an adaptive compensation ring cavity device and method for free-form surface interference detection. Background technique [0002] Optical inspection is a major challenge to realize the widespread application of optical freeform surfaces. According to the measurement experience of plane, sphere and aspheric surface, interferometry has become the preferred method for high-precision free-form surface measurement. Of course, the first problem to be solved is to design a compensator for system inherent aberration correction in the aspheric interferometer. For aspheric surfaces, in the past few decades, people have designed various static compensators, such as Offner compensators, Dall compensators, computer-generated holograms (Computer-generated holograms, CGH) and so on. Compensators with a certain dynamic range, such as partial null compensators and movable refractive aspheric n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02011G01B9/02041G01B9/02056
Inventor 张磊吴金灵刘仁虎俞本立
Owner ANHUI UNIVERSITY
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