Resonance-force balance capacitance type three-axis acceleration transducer and manufacture method
A technology of axial acceleration and sensors, which is applied in the direction of acceleration measurement, measurement acceleration, and multi-dimensional acceleration measurement using inertial force, can solve the problem of single detection method of three-axis acceleration, achieve good linearity, meet high-performance requirements, and are not easy to be distorted effect of error
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[0039] The technical scheme of the invention is used to manufacture a resonance-force balance capacitive triaxial acceleration sensor. Wherein, the X-axis and Y-axis acceleration signals are detected by a miniature double-end solid-supported beam resonator (4) that is electrothermally excited by polysilicon resistance and piezoresistively detected. Its production process is as follows:
[0040] 1) An N-type silicon wafer with a (100) plane and a resistivity of 0.1Ω.cm is used as the intermediate silicon wafer (1). (see attached image 3 [1])
[0041] 2) Thermal oxidation to produce a silicon dioxide film (14) with a thickness of 1 micron. (see attached image 3 [2])
[0042] 3) Depositing a polysilicon film (15) with a thickness of 1 micron by low-pressure chemical vapor deposition. (see attached image 3 [3])
[0043] 4) thermal oxidation, part of the polysilicon film (15) is oxidized to silicon dioxide (16), photolithography and etching processes are combined to make...
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